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Auxiliary device for preparing thin film electrode

An auxiliary device and thin-film electrode technology, which is applied in the field of auxiliary devices for preparing thin-film electrodes, can solve problems such as loose contact and uneven thin-film electrodes

Inactive Publication Date: 2014-04-30
HENAN UNIVERSITY
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] The purpose of the present invention is to provide an auxiliary device for preparing thin film electrodes, which is used to solve the problem that the thin film electrodes prepared are not uniform due to the loose contact between the mask plate and the substrate in the existing thin film electrode preparation process.

Method used

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Embodiment Construction

[0011] Examples of auxiliary devices for preparing thin-film electrodes of the present invention: such as figure 1 , figure 2 As shown, the chassis 1 of the auxiliary device is a circular structure with a certain thickness, and the mask plate 5 and the substrate 6 for preparing the thin film electrodes are stacked up and down and placed at the center of the circle on the upper end face of the chassis 1. The placement mask of the chassis 1 The area of ​​the plate 5 and the substrate 6 is the support end surface, the center of the base plate 1 is the center of the support end surface, and a pressing mechanism is also installed on the base plate 1 . The pressing mechanism includes four pressing clips 4 and four control screws 3. One end of the pressing clip 4 is placed on the chassis 1, and the other end is press-fitted on the mask plate 5. The four control screws 3 are one by one. Correspondingly pass through the four tableting clips 4 and finally screw into the chassis 1, the...

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Abstract

The invention discloses an auxiliary device for preparing a thin film electrode, which comprises a chassis. The chassis is provided with a supporting end face for supporting a mask plate and a substrate which are overlaid up and down; a pressing mechanism for applying a pressing force for pressing toward the substrate to the mask plate is also arranged on the chassis; and the pressing mechanism comprises a pressure clamp for being pressed on the mask plate and a position control screw which is screwed into the chassis by screw threads after passing downward through the pressing clamp so as to fixedly connect the pressing plate and the chassis. The mask plate can be tightly pressed by the pressing clamp by screwing the position control screw so as to control the pressing degree of the mask plate and the substrate and ensure the mask plate to be sufficiently and tightly contacted with the substrate, thereby avoiding the phenomena of bonding of electrode points and nonuniform thickness of the thin film electrode in the preparation process of the thin film electrode and providing powerful guarantee for preparing the high-quality thin film electrode.

Description

technical field [0001] The invention relates to a preparation process of a thin film electrode, in particular to an auxiliary device which can adjust the close contact degree between a mask plate and a substrate. Background technique [0002] At present, the well-known thin film electrode preparation method is to place the mask directly on the substrate, and then obtain the thin film electrode required for the experiment through the thin film preparation process. Although this method is simple and easy to implement, because the contact between the mask plate and the substrate is not close, electrode point adhesion and uneven thickness of the thin film electrode will occur during the growth process of the thin film electrode, which will seriously affect the results. Stability of thin film device performance. SUMMARY OF THE INVENTION [0003] The purpose of the present invention is to provide an auxiliary device for preparing thin-film electrodes, which is used to solve the...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/04C23C16/04
Inventor 张伟风张婷马文海孙健魏凌贾彩虹
Owner HENAN UNIVERSITY
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