Method and device for recovering waste silicon powder from trichlorosilane synthetic furnace
A technology of trichlorosilane and recycling methods, which is applied in the direction of silicon halide compounds, silicon, halosilane, etc., and can solve problems such as complicated operation, large investment, and unusable silicon powder
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment Construction
[0017] Such as figure 1 As shown, the waste silicon powder recovery device of the trichlorosilane synthesis furnace described in the embodiment of the present invention includes a synthesis furnace 10 and a silicon powder collection tank 40, and the synthesis furnace 10 communicates with the interface of the silicon powder collection tank 40 through a metal hose 30 , the bottom of the synthesis furnace 10 has a cone structure 20, the two ends of the cone structure 20 are respectively connected with the nitrogen inlet pipeline 1 and the normal hydrogen chloride intake pipeline 2, at the top of the cone structure 20 of the synthesis furnace 10 The side wall is provided with a silicon powder discharge valve 30, and the silicon powder discharge valve 30 is connected to the interface on the side wall of the silicon powder collection tank 40 through a metal hose 3, at the nitrogen outlet 4 at the top of the silicon powder collection tank 40 A bag filter 50 is provided.
[0018] Tri...
PUM
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com