Method and device for recovering waste silicon powder from trichlorosilane synthetic furnace

Abstract

A method for recovering waste silicon powder from the trichlorosilane synthetic furnace comprises the synthetic furnace and a silicon powder collection tank, and includes steps: A, replacing the synthetic furnace after the synthetic furnace stops normally; B, after replacement is qualified, connecting a silicon powder discharging valve at the bottom of the synthetic furnace with the silicon powder collection tank through a metal hose, and feeding nitrogen into the synthetic furnace through a nitrogen inlet pipeline; and C, turning on the silicon powder discharging valve to enable the silicon powder along with the nitrogen to be brought into the silicon powder collection tank, and emptying the nitrogen through a cloth bag filter at the top of the silicon powder collection tank to enable the silicon powder to be collected into the silicon powder collection tank, so that the silicon powder is fully recycled. The method for recovering waste silicon powder from the trichlorosilane synthetic furnace has the advantages that the method is simple in process, easy in implementation of process conditions and convenient to operate; and waste silicon powder in the synthetic furnace can be fully recycled in reproduction, and dust hazards to personnel bodies during recovery can be avoided. The invention further discloses a device for recovering waste silicon powder from the trichlorosilane synthetic furnace.

Description

technical field [0001] The invention relates to a method for recovering waste silicon powder from a trichlorosilane synthesis furnace, in particular, it changes the recovery method of waste silicon powder in the original synthesis furnace, which greatly saves labor and reduces the waste of silicon powder. Powder can still be used. Background technique [0002] At present, in the polysilicon industry, after the shutdown of the trichlorosilane synthesis furnace in most enterprises, the silicon powder in the synthesis furnace needs to be recovered. The silicon powder dust is serious during disassembly, which affects the health of the demolition personnel. At the same time, a large amount of silicon powder is splashed onto the ground during disassembly, making the silicon powder unusable. [0003] The patent number is CN101966993A, the name is a method for recycling waste silicon powder in the production process of trichlorosilane, and the equipment for comprehensively utilizin...

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Problems solved by technology

[0002] At present, in the polysilicon industry, after the shutdown of the trichlorosilane synthesis furnace in most enterprises, the silicon powder in the synthesis furnace needs to be recovered. As a result, the silicon powder dust is serious during disassembly, which affects the health of the demolition personnel. At the same time, a large amount of silicon powder is splashed to the ground during disassembly, making the silicon powder unusable.

[0003] The patent number is CN101966993A, the name is a method for recycling waste silicon powder in the production process of trichlorosilane, and the equipment for comprehensively utilizing waste silicon powder to produce trichlorosilane, including the outlet pipeline connection of the mixed gas of the trichlorosilane synthesis furnace Cyclone separator, the discharge port of the high-efficiency cyclone separator is connected to the silicon powder recovery tank; the gas outlet of the high-efficiency cyclone separator is connected to the first-stage cyclone separator, and a first-stage slag storage tank is arranged below the first-stage cyclone separator. The gas outlet of the separator is connected to the secondary cyclone separator, and a secondary slag storage tank is arranged under the secondary cyclone separator; the gas outlet of the secondary cyclone separator is connected to the primary bag filter and the secondary bag filter in sequence, Both the outlets of the primary bag filter and the secondary bag filter are connected to the silicon powder recovery tank through the slag blowing pipeline, and the discharge port of the silicon powder recovery tank is connected to the recovery port of the trichlorosilane synthesis furnace, but the equipment has investment Disadvantages such as large size, complicated operation, and large equipment footprint

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