Non-evaporable type low-temperature activating zirconium-based getter alloy and preparation process thereof
A getter, non-evapotranspiration technology, applied in other chemical processes, chemical instruments and methods, etc., can solve the problems of the decrease of the getter's gettering ability, attenuation, failure to meet the requirements of use, etc., and achieve low activation temperature and high absorption. The effect of gas performance
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Embodiment 1
[0030] This embodiment provides a non-evaporable low-temperature activated zirconium-based getter alloy, its composition and mass percentage are: zirconium: 75.2%, cobalt: 18%, lanthanide rare earth: 6.6%, other unavoidable impurities: 0.2% %; the composition and mass percentage of the lanthanide rare earths are: lanthanum: 60.5%, neodymium: 29.5%, and other lanthanide elements: 10%.
[0031] Getter alloy manufacturing process: Break the above three metal element materials into pieces not larger than 30mm square, and place them in the graphite crucible of the intermediate frequency vacuum melting furnace according to the above ratio. When the vacuum degree is less than 3×10 -1 Pa, start heating and melting, the melting temperature is 1950°C. When the material is completely melted into a liquid state, maintain the state and continue to homogenize for a certain period of time. After completion, pour it into the cooling mold, and take it out of the furnace body after it is comple...
Embodiment 2
[0035] This embodiment provides a non-evaporable low-temperature activated zirconium-based getter alloy, its composition and mass percentage are: zirconium: 75.9%, cobalt: 17.7%, lanthanide rare earth: 6.2%, other unavoidable impurities: 0.2% %; the composition and mass percentage of the lanthanide rare earths are: lanthanum: 60%, neodymium: 30%, and other lanthanide elements: 10%.
[0036] Getter alloy manufacturing process: Break the above three metal element materials into pieces not larger than 30mm square, and place them in the graphite crucible of the intermediate frequency vacuum melting furnace according to the above ratio. When the vacuum degree is less than 3×10 -1 Pa, start heating and melting, the melting temperature is 1950°C. When the material is completely melted into a liquid state, maintain the state and continue to homogenize for a certain period of time. After completion, pour it into the cooling mold, and take it out of the furnace body after it is complete...
Embodiment 3
[0040] This embodiment provides a non-evaporable low-temperature activated zirconium-based getter alloy, the composition and mass percentage of which are: zirconium: 76.4%, cobalt: 17%, lanthanide rare earth: 6.4%, other unavoidable impurities: 0.2% %; the composition and mass percentage of the lanthanide rare earths are: lanthanum: 59.5%, neodymium: 30.5%, and other lanthanide elements: 10%.
[0041] Getter alloy manufacturing process: Break the above three metal element materials into pieces not larger than 30mm square, and place them in the graphite crucible of the intermediate frequency vacuum melting furnace according to the above ratio. When the vacuum degree is less than 3×10 -1 Pa, start heating and melting, the melting temperature is 1950°C. When the material is completely melted into a liquid state, maintain the state and continue to homogenize for a certain period of time. After completion, pour it into the cooling mold, and take it out of the furnace body after it ...
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