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Non-evaporable type low-temperature activating zirconium-based getter alloy and preparation process thereof

A getter, non-evapotranspiration technology, applied in other chemical processes, chemical instruments and methods, etc., can solve the problems of the decrease of the getter's gettering ability, attenuation, failure to meet the requirements of use, etc., and achieve low activation temperature and high absorption. The effect of gas performance

Active Publication Date: 2012-10-31
NANJING GETTERS & ELECTRONICS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

If it is lower than the above temperature, the suction capacity of these getters will be greatly reduced, even attenuated below 50%, which cannot meet the use requirements

Method used

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  • Non-evaporable type low-temperature activating zirconium-based getter alloy and preparation process thereof
  • Non-evaporable type low-temperature activating zirconium-based getter alloy and preparation process thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0030] This embodiment provides a non-evaporable low-temperature activated zirconium-based getter alloy, its composition and mass percentage are: zirconium: 75.2%, cobalt: 18%, lanthanide rare earth: 6.6%, other unavoidable impurities: 0.2% %; the composition and mass percentage of the lanthanide rare earths are: lanthanum: 60.5%, neodymium: 29.5%, and other lanthanide elements: 10%.

[0031] Getter alloy manufacturing process: Break the above three metal element materials into pieces not larger than 30mm square, and place them in the graphite crucible of the intermediate frequency vacuum melting furnace according to the above ratio. When the vacuum degree is less than 3×10 -1 Pa, start heating and melting, the melting temperature is 1950°C. When the material is completely melted into a liquid state, maintain the state and continue to homogenize for a certain period of time. After completion, pour it into the cooling mold, and take it out of the furnace body after it is comple...

Embodiment 2

[0035] This embodiment provides a non-evaporable low-temperature activated zirconium-based getter alloy, its composition and mass percentage are: zirconium: 75.9%, cobalt: 17.7%, lanthanide rare earth: 6.2%, other unavoidable impurities: 0.2% %; the composition and mass percentage of the lanthanide rare earths are: lanthanum: 60%, neodymium: 30%, and other lanthanide elements: 10%.

[0036] Getter alloy manufacturing process: Break the above three metal element materials into pieces not larger than 30mm square, and place them in the graphite crucible of the intermediate frequency vacuum melting furnace according to the above ratio. When the vacuum degree is less than 3×10 -1 Pa, start heating and melting, the melting temperature is 1950°C. When the material is completely melted into a liquid state, maintain the state and continue to homogenize for a certain period of time. After completion, pour it into the cooling mold, and take it out of the furnace body after it is complete...

Embodiment 3

[0040] This embodiment provides a non-evaporable low-temperature activated zirconium-based getter alloy, the composition and mass percentage of which are: zirconium: 76.4%, cobalt: 17%, lanthanide rare earth: 6.4%, other unavoidable impurities: 0.2% %; the composition and mass percentage of the lanthanide rare earths are: lanthanum: 59.5%, neodymium: 30.5%, and other lanthanide elements: 10%.

[0041] Getter alloy manufacturing process: Break the above three metal element materials into pieces not larger than 30mm square, and place them in the graphite crucible of the intermediate frequency vacuum melting furnace according to the above ratio. When the vacuum degree is less than 3×10 -1 Pa, start heating and melting, the melting temperature is 1950°C. When the material is completely melted into a liquid state, maintain the state and continue to homogenize for a certain period of time. After completion, pour it into the cooling mold, and take it out of the furnace body after it ...

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Abstract

The invention relates to a getter alloy, a non-evaporable type low-temperature activating zirconium-based getter alloy and a preparation process thereof. The getter alloy comprises, by mass, 75-77% of zirconium, 17-19% of cobalt, 6%-7% of lanthanide series rear earth and 0%-0.5% of other inevitable impurities, and the lanthanide series rear earth comprises, by mass, 60%+ / -5% of lanthanum, 30%+ / -3% of neodymium and 10%+ / -1% of other lanthanide series elements. The getter alloy has the advantages of low-temperature activating, simultaneously, the hydrogen gettering ability of the getter alloy is higher than that of traditional zirconium-based getters, and the low activation temperature and the high gettering performance are guaranteed.

Description

technical field [0001] The invention relates to a getter alloy, in particular to a non-evaporable low-temperature activated zirconium-based getter alloy and a preparation method thereof. Background technique [0002] In electric light source products, thermal insulation equipment, and similar devices that require a vacuum state, in order to maintain long-term work stability and prolong the service life of the device, it is necessary to maintain a certain degree of vacuum in the device for a long time. Therefore, in such devices, Both require the use of getter products. Because as time goes by, the gas molecules remaining in the device inside the device will be slowly released from the device, and the gas molecules outside the device, especially the smaller hydrogen molecules, will also penetrate the outer wall of the device and enter the inside of the device. All will cause the vacuum degree in the device to gradually decrease. If these released or penetrated gas molecules...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C22C16/00C22C1/02B01J20/02B01J20/30
Inventor 邓子宁徐丹
Owner NANJING GETTERS & ELECTRONICS
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