Automatic equal diameter controlling method for germanium single crystal straight-pull growth method

A control method and germanium single crystal technology, applied in the field of diameter control, can solve the problems of uneven shape of germanium crystals, the inability of equal diameters to meet the requirements for use, etc., and achieve the effect of improving production efficiency

Inactive Publication Date: 2012-10-31
XAUT CRYSTAL GROWING TECH CO LTD
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Problems solved by technology

[0005] The purpose of the present invention is to provide an automatic equal-diameter control method for germanium single crystal Czochralski growth method, wh...

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  • Automatic equal diameter controlling method for germanium single crystal straight-pull growth method
  • Automatic equal diameter controlling method for germanium single crystal straight-pull growth method
  • Automatic equal diameter controlling method for germanium single crystal straight-pull growth method

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Embodiment Construction

[0033] The present invention will be described in detail below in conjunction with the accompanying drawings and specific embodiments.

[0034] The invention provides an automatic equal-diameter control method of a germanium single crystal Czochralski growth method, such as figure 1 As shown, follow the steps below to implement:

[0035] 1) Set the diameter of the germanium crystal to be prepared, and set the initial crystal lift motor pulling speed SL;

[0036] 2) Establish speed control loop, temperature control loop a and temperature control loop b, among them,

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Abstract

The invention discloses an automatic equal diameter controlling method for germanium single crystal straight-pull growth method, which includes the following steps: setting the diameter of the germanium crystal required to be prepared, setting the initial lifting speed SL of a crystal rise motor, and establishing a speed control ring, a temperature control ring a and a temperature control ring b. When a diameter measurement value deviates from a diameter set value during the growth process of the germanium single crystal, a diameter deviation e1 is formed between the diameter measurement value and the diameter set value, then the three control rings are matched mutually to automatically adjust lifting speed of the crystal rise motor and the temperature set SP of a temperature controller, so as to enable the diameter measurement value to be equal to the diameter set value. The automatic equal diameter controlling method improves the manual diameter control during the germanium single crystal production into automatic diameter control, improves the production efficiency, reduces the wastes caused by the follow-up polishing, rounding and slicing processes of the single crystal bar.

Description

technical field [0001] The invention belongs to the technical field of semiconductor electronics, and relates to an automatic equal-diameter control method of a germanium single crystal Czochralski growth method. Background technique [0002] Germanium crystal has the advantages of good infrared transmission performance, high refractive index, low dispersion, no deliquescence, high mechanical strength and good chemical stability, etc. It is the first choice material for the optical system of 8-12μm band thermal imager. There are two types of germanium crystals used in infrared optical systems: single crystal and polycrystalline. Polycrystalline germanium has the advantages of low cost, simple process, and can be directly processed into appropriate shapes. However, polycrystalline germanium has grain boundaries, and its optical uniformity and mechanical properties are inferior to single crystal germanium. Therefore, high-precision infrared systems still use single crystal ger...

Claims

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Application Information

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IPC IPC(8): C30B15/22
Inventor 张红勇姚婕
Owner XAUT CRYSTAL GROWING TECH CO LTD
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