Single code channel absolute grating scale rolling and impressing mould manufacturing method

Abstract

The invention discloses a single code channel absolute grating scale rolling and impressing mould manufacturing method, which comprises the following steps: a spiral single code channel absolute grating scale rolling and impressing mould base body is machined; photoresist is coated; rotary exposure of grid lines on the entire spiral line belt is performed through the way that the encoding of a single code channel absolute grating is adopted to control the rotation angle of a precise rotary circular dividing table, the movement of a mask, and the on / off of an ultraviolet light source; and the development and wet process etching are performed to form a single code channel absolute grating scale grid line structure, and the rolling and impressing mould is produced. According to the method, the spiral line belt is wound on the mould base body for a plurality of circles, so that a single code channel absolute grating scale grid line pattern with custom-built length is produced on a cylindrical base body of limited diameter; and the single code channel absolute grating scale rolling and impressing mould prepared through adopting the method is combined with the rolling and impressing pleomorphism technology, and can be used for realizing the efficient, low-cost and batch manufacture of meter-grade super-long single code channel absolute grating scales.

Description

technical field [0001] The invention belongs to the technical field of manufacturing a roller embossing mold in a grating manufacturing process, and in particular relates to a manufacturing method of a single-track absolute grating ruler roller embossing mold. technical background [0002] The grating ruler as a displacement measuring element can be divided into two types: incremental and absolute according to the measurement method. Compared with the size of the incremental grating, the absolute grating scale can immediately provide the current position value without executing the reference point return program when the system is turned on, and it has increasingly extensive use requirements in the CNC machine tool and testing instrument industries. [0003] The single-code absolute grating ruler can realize the uniqueness of position information from the coding principle. Compared with the multi-code absolute grating ruler, the optical system and circuit processing part are...

AI Technical Summary

Problems solved by technology

[0004] The conventional grating scale manufacturing method is to manufacture a high-precision master grating by photolithography, and then use it as a master for replication. The process steps are complicated and the accuracy loss is large.

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