Design method of baffle for controlling distribution of film thickness of planar optical element in film coating planetary system
A technology of optical components and planetary systems, which is applied in the field of baffle design to control the film thickness distribution of planar optical components, and can solve problems such as difficult analytical solutions for baffles, the need for several or even dozens of process experiments, and complex projection trajectories.
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[0023] Such asfigure 1 Shown is a schematic diagram of the thermal evaporation source-planar optical element-baffle combination system in a thermal evaporation vacuum coating machine equipped with a planetary system. In the thermal evaporation vacuum coating process, the evaporated thin film material is transported in a vacuum environment and deposited on the surface of a flat optical element to form a thin film. Generally, when the film thickness distribution control technology is not adopted, the thickness of the film formed by depositing the film material on the surface of the planar optical element has a non-uniform distribution. This non-uniform film thickness distribution makes the planar optical film elements unable to meet the performance requirements of the optical system, so it is necessary to control the film thickness distribution on the planar optical elements in the planetary system of the vacuum coating machine. The most common approach is to use baffles to cont...
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