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Method for preparing sensor membrane material based on flexible substrate

A flexible substrate and sensor technology, applied in the analysis of materials, material analysis through electromagnetic means, instruments, etc., can solve the problems of poor operability, corrosion of flexible substrates, etc., and achieve the effect of operability

Inactive Publication Date: 2012-11-28
INST OF MICROELECTRONICS CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] However, for sensors based on flexible substrates, the doping of strong acid will cause certain corrosion to the flexible substrate, and the operability is poor.

Method used

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  • Method for preparing sensor membrane material based on flexible substrate
  • Method for preparing sensor membrane material based on flexible substrate
  • Method for preparing sensor membrane material based on flexible substrate

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Embodiment Construction

[0020] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be described in further detail below in conjunction with specific embodiments and with reference to the accompanying drawings.

[0021] The invention belongs to the field of gas sensors based on flexible substrates (PI, PET, etc.) for normal temperature detection, in particular to a sensor sensitive film for detecting alcohols (methanol, ethanol, isopropanol, etc.) and ammonia based on flexible substrates The method of preparation of the material.

[0022] Such as figure 1 as shown, figure 1 It is a flow chart of a method for preparing a sensor film material for detecting gas at normal temperature based on a flexible substrate according to an embodiment of the present invention, and the method includes the following steps:

[0023] Step 1: Clean the flexible substrate, apply photoresist on the flexible substrate, and then photolithographically de...

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Abstract

The invention discloses a method for preparing a flexible substrate-based sensitive membrane material of a sensor for detecting gases. The method comprises the following steps of: cleaning a flexible substrate, coating a photoresist on the flexible substrate and then performing photoetching development so as to etch off partial photoresist, thereby forming an electrode pattern; orderly forming a Cr layer and a Au layer on the flexible substrate with the electrode pattern formed thereon, and peeling off the two layers to form a Cr / Au electrode; and then depositing a layer of carbon nano-tube doped poly-m-aminophenol film on the substrate on which the Cr / Au electrode is formed already by methods such as dip-coating, screen printing and the like. According to the flexible substrate-based sensitive membrane material provided by the invention, the doping of the carbon nano-tubes completely takes the place of a concentrated strong acid traditionally doped in poly-m-aminophenol; in addition, the doping of the carbon nano-tubes also improves the sensitivity of the poly-m-aminophenol material to the detection of alcohols and ammonia at the normal temperature, and also realizes operability on the flexible substrate.

Description

technical field [0001] The invention relates to the technical field of gas sensors based on flexible substrates, in particular to a method for preparing a flexible substrate-based sensor sensitive film material for detecting gases at normal temperatures, and the sensor sensitive film material is used to detect alcohols at normal temperatures ( methanol, ethanol, isopropanol, etc.) and ammonia. Background technique [0002] With the development of the times, the progress of science and technology and the needs of human life. In recent years, the development of sensors is facing great challenges, and it is imperative to manufacture a light, cheap, and large-scale sensor. Gas sensors based on flexible substrates have fundamentally improved many problems due to their flexibility and other advantages, so that they have broader application prospects. [0003] At present, environmental issues and food safety have become the focus of attention of the whole society. Accurate detect...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N27/00
Inventor 李冬梅詹爽刘明谢常青梁圣法陈鑫
Owner INST OF MICROELECTRONICS CHINESE ACAD OF SCI
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