Blanking mechanism used in outside composite feeding apparatus of single crystal furnace
A technology of blanking mechanism and feeding device, which is applied in the directions of single crystal growth, crystal growth, chemical instruments and methods, etc., can solve the problems of wasting time and the like
Inactive Publication Date: 2012-12-12
杭州慧翔电液技术开发有限公司 +1
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Problems solved by technology
These tedious pre-works waste a lot of time
Method used
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[0016] Specific embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings.
[0017] The blanking mechanism used for the external re-feeding device of the single crystal furnace in the present invention includes a glass funnel 6 and a fixing plate covering its upper edge, and the glass funnel 6 is fixedly connected to the bin 1 through a fixing bracket. A vertical rotating shaft is arranged inside the glass funnel 6, and the rotating shaft deviates from the center line of the glass funnel 6, and its axle sleeve is fixedly connected with the lower surface of the fixed plate, and the rotating shaft is connected with the transmission unit 7 through the nylon bevel gear 5. A throwing mechanism is arranged on the rotating shaft: an impeller 3 is fixedly arranged on the rotating shaft, and the impeller 3 rotates with the rotating shaft. A blanking tray 4 is arranged below the impeller 3, wherein the blanking tray 4 is fixed o...
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The invention relates to a blanking mechanism, and aims at providing a blanking mechanism used in an outside composite feeding apparatus of a single crystal furnace. The mechanism comprises a glass funnel. A vertical rotation shaft is arranged in the glass funnel. A shaft sleeve of the rotation shaft is fixedly connected on the lower surface of a fixed plate covered on the glass funnel. An output shaft horizontally penetrates the side wall of the glass funnel. One end of the output shaft is connected to a transmission unit, and the other end of the output shaft is provided with a nylon bevel gear. A nylon bevel gear is provided on the bottom of the rotation shaft. The nylon bevel gear on the end of the output shaft matches the nylon bevel gear on the bottom of the rotation shaft. An impeller is fixed on the rotation shaft, and a planking plate is arranged below the impeller. The planking plate is sleeved on the rotation shaft, and does not rotate with the rotation shaft. The blanking plate is fixed on the fixed plate through a draw rod. According to the invention, with the operation upon the blanking mechanism, a silicon material in a hopper is uniformly scattered to a pipe of an outside composite feeding apparatus, and is finally fed into the single crystal furnace. During the whole blanking process, the polysilicon raw material is not polluted.
Description
technical field [0001] The invention relates to a material blanking mechanism, in particular to a material blanking mechanism used for an external multiple feeding device of a single crystal furnace. Background technique [0002] After the traditional Czochralski silicon single crystal furnace completes the raw material pulling production of the first furnace, it needs to do a lot of complicated preliminary work for the production of the new furnace, including stopping the furnace for cooling, cleaning the furnace, charging, vacuuming, chemicalizing materials, etc. process. These complicated pre-works waste a lot of time. Because, the more feeding amount in each production cycle, the heavier the drawn crystal, the smaller the unit energy, and the higher the efficiency, the feeding speed and stability of the external re-feeding device will determine whether the device can increase the unit Furnace feeding amount and utilization rate of quartz crucible, choose appropriate ma...
Claims
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IPC IPC(8): C30B15/02
Inventor 朱亮张俊曹建伟王巍沈兴潮
Owner 杭州慧翔电液技术开发有限公司