Orthogonal double grating based synchronous phase shifting common-path interference microscopy detection device and detection method

A synchronous phase-shifting and interference microscopy technology, which is applied in the direction of measuring devices, optical devices, instruments, etc., can solve the problems of complex detection data processing and low measurement accuracy, and achieve strong real-time performance, high measurement resolution, Easy to operate and flexible effects

Inactive Publication Date: 2013-01-09
HARBIN ENG UNIV
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Problems solved by technology

[0006] The present invention aims to solve the problems of complicated process of processing detection data and low measurement accuracy in the existing synchronous phase-shifting interferenc

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  • Orthogonal double grating based synchronous phase shifting common-path interference microscopy detection device and detection method
  • Orthogonal double grating based synchronous phase shifting common-path interference microscopy detection device and detection method
  • Orthogonal double grating based synchronous phase shifting common-path interference microscopy detection device and detection method

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Example Embodiment

[0040] Specific implementation mode 1: the following combination Figure 1 to Figure 4 To explain this embodiment, the synchronous phase-shifting co-optical path interference microscopy detection device based on orthogonal double gratings in this embodiment includes a light source 1, a linear polarizer 2, a collimating beam expanding system 3, and a first beam splitter. Prism 4, second dichroic prism 5, first λ / 4 wave plate 6, correction objective lens 7, microscope objective lens 8, object to be measured 9, second λ / 4 wave plate 10, third λ / 4 wave plate 11, Rectangular window 12, first Fourier lens 13, one-dimensional periodic amplitude grating 14, one-dimensional periodic phase grating 15, second Fourier lens 16, four-quadrant polarizer group 17, image sensor 18 and computer 19, where λ Is the light wavelength of the light beam emitted by light source 1,

[0041] The one-dimensional periodic amplitude grating 14 and the one-dimensional periodic phase grating 15 form a double gr...

Example Embodiment

[0053] Second embodiment: This embodiment is a further description of the first embodiment. The first beam splitting prism 4 and the second beam splitting prism 5 are both non-polarizing beam splitting prisms, and the second λ / 4 wave plate 10 and the third λ / 4 wave The fast axis directions of the slices 11 are the same.

Example Embodiment

[0054] Embodiment 3: This embodiment is a further description of Embodiment 1. The first beam splitting prism 4 and the second beam splitting prism 5 are both polarization beam splitting prisms, and the second λ / 4 wave plate 10 and the third λ / 4 wave plate The fast axis directions of 11 are perpendicular to each other.

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Abstract

The invention discloses an orthogonal double grating based synchronous phase shifting common-path interference microscopy detection device and a detection method, and belongs to the technical field of optical interfering detection. The invention solves problems of complexity in processing process of detection data and low measurement accuracy in existing synchronous phase shifting interference microscopy detection methods. The method integrates the interfering microscopy technology with the orthogonal double grating common-path synchronous phase shifting technology, linear polarization parallel light after collimation and beam expansion is divided into object light and reference light by a first polarized beam splitter prism and a second polarized beam splitter prism to be ultimately converged at a rectangular window side-by-side, a computer obtains an interference figure containing four patterns by collection, and phase distribution of an object to be detected is obtained by calculating according to strength distribution of the four interference patterns. The orthogonal double grating based synchronous phase shifting common-path interference microscopy detection device and the detection method are suitable for measurement of three-dimensional shape and phase distribution of micro-objects.

Description

technical field [0001] The invention relates to a synchronous phase-shift common optical path interference microscopic detection device and detection method based on orthogonal double gratings, belonging to the technical field of optical interference detection. Background technique [0002] Interference microscopy combines interference technology and microscopic magnification technology, which can accurately analyze the three-dimensional shape of objects and the phase information of phase-type objects. It is an ideal method for measuring the three-dimensional shape and phase distribution of tiny objects. [0003] In 2006, the Swiss company Lyncee Tec launched the DHM-1000 digital holographic microscope for the first time, which can be used to measure the three-dimensional shape and phase distribution of tiny objects. However, due to the off-axis holographic optical path, the CCD resolution and spatial bandwidth product of the image sensor cannot be fully utilized; at the sa...

Claims

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Application Information

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IPC IPC(8): G01B9/04G01B11/26
Inventor 单明广钟志郝本功刁鸣张雅彬窦峥
Owner HARBIN ENG UNIV
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