Method and device for preparing large area of micro gratings on surface of target material by utilizing ultra-fast laser
An ultra-fast laser and micro-grating technology, applied in laser welding equipment, diffraction gratings, optics, etc., can solve problems such as difficulty in large-area processing, and no large-area processing has been proposed, so as to improve processing speed and overcome processing costs. higher effect
Inactive Publication Date: 2013-02-06
BEIJING UNIV OF TECH
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Problems solved by technology
The existing laser direct writing technology generally uses a single lens to focus the laser, and the focal diameter is about 50um. It is difficult to achieve large-scale processing of such a large processing area.
So far, there have been no reports proposing the realization of large-area treatment of material surfaces with ultrafast lasers.
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[0035] The present invention will be described in further detail below in conjunction with the accompanying drawings and embodiments.
[0036] Such as figure 1 As shown, the present invention provides a method for preparing a large-area micro-grating on the surface of a target using an ultrafast laser, comprising the following steps:
[0037] 100. By changing the exit light path of the ultrafast laser, the energy and polarization direction of the exit light beam are adjusted.
[0038] Specifically, step 100 includes the following steps:
[0039] (a), after the ultrafast laser passes through the attenuator, the energy generation of the outgoing beam can generate a micro-grating structure on the target surface; the ablation threshold;
[0040] (b) The outgoing light beam is incident on the half-wave plate, and the polarization direction of the outgoing light beam is adjusted to the desired fringe direction perpendicular to the surface of the target through the half-wave plate....
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The invention relates to the technical field of laser surface treatment, in particular to a method for preparing a large area of micro gratings on the surface of a target material by utilizing ultra-fast laser. The method comprises the following steps: changing the emergent optical path of ultra-fast laser to adjust energy and polarization direction of an emergent light beam; dividing the polarized light beam of which the optical path is changed with a light splitting piece group into split light beams with equal energies; focusing multi-ways of split light beams into multi-ways of parallel linear focal line light spots capable of forming a micro grating structure on the surface of the target material through a cylindrical lens group; and controlling the position of the target material through a sample console, so as to ensure that the multi-ways of parallel linear focal line light spots can conduct comprehensive scanning on the surface of the target material, and the micro grating structure with a large area is formed. The device adopting the method comprises an attenuation piece, a half-wave piece, the light splitting piece group and the cylindrical lens group. According to the invention, the processing speed of ultra-fast laser on the surface of the target material is accelerated, so as to achieve the purpose of preparing the large-area micro grating structure on the surface of the target material.
Description
technical field [0001] The invention relates to the technical field of laser surface treatment, in particular to a method and a device for preparing a large-area micro-grating on the surface of a target by using an ultrafast laser. Background technique [0002] The microstructure on the material surface often makes the material exhibit many special properties. For example: the micro-nano papillae structure growing on the surface of the lotus leaf makes the contact angle between the leaf surface and water droplets larger, so that the lotus leaf has super-hydrophobicity and self-cleaning properties, and has won the reputation of "out of mud without staining". The gecko's claws are also densely covered with folds and fluff. This micro-nano structure increases the contact area between the gecko and the wall, and strengthens the van der Waals force, allowing the gecko to crawl freely on the wall. It is the greatest dream of human beings to use natural phenomena to transform our ...
Claims
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IPC IPC(8): B23K26/36B23K26/067G02B5/18G02B27/10
Inventor 刘世炳刘嵩宋海英董祥明
Owner BEIJING UNIV OF TECH