Synchronous phase shifting interference microscopy detection device and detection method based on orthogonal double-grating

A technology of interference microscopy and synchronous phase shifting, which is applied in the direction of measuring devices, optical devices, instruments, etc., can solve problems such as complex data processing, and achieve the effects of high measurement resolution, convenient and flexible operation, and simple and easy methods

Inactive Publication Date: 2013-02-06
HARBIN ENG UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0006] The purpose of the present invention is to solve the complex data processing problem of the existing synchronous phase-shifting interference microscopic detection method to realize t

Method used

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  • Synchronous phase shifting interference microscopy detection device and detection method based on orthogonal double-grating
  • Synchronous phase shifting interference microscopy detection device and detection method based on orthogonal double-grating
  • Synchronous phase shifting interference microscopy detection device and detection method based on orthogonal double-grating

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specific Embodiment approach 1

[0037] Specific implementation mode one: the following combination Figure 1 to Figure 4 Illustrate this embodiment, the synchronous phase-shifting interference microscope detection device based on the orthogonal double grating described in this embodiment, it comprises light source 1, it also comprises linear polarizer 2, first polarizing beam-splitting prism 3, first collimating expander Beam system 4, object to be measured 5, microscope objective lens 6, correction objective lens 7, first reflector 8, second reflector 9, second collimator beam expander system 10, second polarization beam splitter prism 11, λ / 4 wave Plate 12, rectangular window 13, first Fourier lens 14, one-dimensional period amplitude grating 15, one-dimensional period phase grating 16, second Fourier lens 17, four-quadrant polarizer group 18, image sensor 19 and computer 20 , where λ is the light wavelength of the beam emitted by light source 1,

[0038] The one-dimensional period amplitude grating 15 an...

specific Embodiment approach 2

[0050] Embodiment 2: This embodiment is a further description of Embodiment 1. The one-dimensional periodic amplitude grating 15 is a binary one-dimensional periodic amplitude grating, a sine one-dimensional periodic amplitude grating or a cosine one-dimensional periodic amplitude grating.

specific Embodiment approach 3

[0051] Embodiment 3: This embodiment is a further description of Embodiment 1 or 2. The one-dimensional periodic phase grating 16 is a binary grating with phases 0 and π.

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Abstract

The invention discloses a synchronous phase shifting interference microscopy detection device and a detection method based on orthogonal double-grating, which belong to the technical field of optical interference microscopy detection, and solve the problem that in the existing phase shifting interference microscopy detection method, data processing for realizing phase recovery of a to-be-detected object is complex. The interference microscopy technology and the orthogonal double-grating spectral synchronous phase shifting technology are combined to realize the detection to the appearance of the to-be-detected object, linearly polarized light is divided into object beams and reference beams through a first polarized beam splitter, then the object beams and the reference beams are converged to a second polarized beam splitter side by side, finally, an interference image comprising four images is acquired by an image sensor and a computer connected with the image sensor, and the phase distribution of the to-be-detected object is calculated by use of a four-step phase shifting formula; and a optical path is free from being changed and any device component is free from being moved during the operation. The device and the method are applied to the appearance detection of the to-be-detected object.

Description

technical field [0001] The invention relates to a synchronous phase-shifting interference microscopic detection device and detection method based on orthogonal double gratings, belonging to the technical field of optical interference microscopic detection. Background technique [0002] Interference microscopy combines interference technology and microscopic magnification technology, which can accurately analyze the three-dimensional shape of objects and the phase information of phase-type objects. It is an ideal method for measuring the three-dimensional shape and phase distribution of tiny objects. [0003] In 2006, the Swiss company Lyncee Tec launched the DHM-1000 digital holographic microscope for the first time, which can be used to measure the three-dimensional shape and phase distribution of tiny objects. However, due to the off-axis holographic optical path, the resolution and spatial bandwidth product of the image sensor CCD cannot be fully utilized; at the same ti...

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Application Information

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IPC IPC(8): G01B9/02G01B11/06
Inventor 单明广钟志郝本功刁鸣张雅彬窦峥
Owner HARBIN ENG UNIV
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