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Nano stress sensor based on metal nano gap and preparation method thereof

A stress sensor and metal nanotechnology, which is applied in the coating process of metal materials, processes and instruments for producing decorative surface effects, etc., can solve the problems of slow, low industrial value of stress changes, controllable realization and electrode laying difficulties. and other problems, to achieve the effect of fast response, easy miniaturization and miniaturization, and high sensitivity

Active Publication Date: 2013-02-06
南通纳瑞纳米科技有限公司
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Problems solved by technology

Since the tunneling effect was confirmed experimentally in the 1980s, it has been considered that the controllable realization of such a small gap and electrode laying are very difficult, and the stress variation within this size has little industrial value
Even at present, the most advanced electron beam lithography machine can only achieve the ideal line accuracy greater than 10nm, so the research on the use of small gaps for stress / strain sensing has been slow

Method used

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  • Nano stress sensor based on metal nano gap and preparation method thereof
  • Nano stress sensor based on metal nano gap and preparation method thereof
  • Nano stress sensor based on metal nano gap and preparation method thereof

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Embodiment Construction

[0024] In order to better understand the technical content of the present invention, specific embodiments are given together with the attached drawings for description as follows.

[0025] Firstly, the method of sensing using the nanogap is introduced. The principle is as figure 1 shown, if any figure 1 (a) shows a nanoscale gap d, the current I∝Ve between metal nanostructures (3) (which can be bulk or metal nanospheres) -kd , where V is the voltage across the nanogap. If there is local stress or strain on the substrate, such as figure 1 (b) is the tensile stress, figure 1 (c) is the shear stress, no matter which stress mode it is, it will cause the metal gap d to change Δd, and the tunneling current will change sensitively.

[0026] figure 2 It is a schematic structural diagram of a nano-stress sensor based on a metal nano-gap according to an embodiment of the present invention. Such as figure 2 As shown, the nano-stress sensor based on the metal nano-gap includes: ...

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Abstract

The invention provides a nano stress sensor based on a metal nano gap and a preparation method thereof. The nano stress sensor based on the metal nano gap comprises a substrate made of an insulating material and a pair of metal thin film electrodes arranged on the substrate; wires are led out from the metal thin film electrodes so as to be connected with an external measurement ammeter; a metal nano structure for forming a conductive path can be formed between the metal thin film electrodes; and the metal nano structure comprises at least one nano gap. According to the sensor disclosed by the invention, a high-frequency vibration signal can be rapidly responded and the high-frequency vibration signal is converted into an electric signal; and the nano stress sensor has the advantages of high sensitivity, fast responding speed, easiness for miniaturization and microminiaturization and high stability. The stress sensor disclosed by the invention can be applied to the fields of scientific experiments, control and management of a production process, production quality identification, engineering diagnosis and evaluation and the like.

Description

technical field [0001] The invention relates to a nano-stress sensor, and in particular to a nano-stress sensor based on a metal nano-gap and a preparation method thereof. Background technique [0002] Stress / strain sensors are a broad class of commercially available sensors. It has a wide range of applications, and it is mainly used in the commercial weighing industry and industrial measurement and control fields. The mechanism of this type of sensor is also very rich, including electromagnetic force, photoelectric, hydraulic, capacitive, magnetic pole change, vibration, gyroscope, resistance strain and so on. For example, a large number of invention patents introduce the use of fiber gratings to detect small local optical changes and distributed sensing to detect micro-area stress. Such sensors often include relatively complex optical measurement systems, which are costly and cumbersome to operate during the measurement process. In many industrial occasions, stress / strai...

Claims

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Application Information

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IPC IPC(8): G01L1/20B81C1/00
Inventor 谢波郑蒙阳陆伟华
Owner 南通纳瑞纳米科技有限公司
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