In-situ indentation/scratch testing device
A scratch test, in-situ technology, applied in the direction of testing material hardness, etc., can solve the problems of nano-indentation and scratch test device development and research are few, hindering development, etc., to achieve compact structure, high positioning accuracy, quality light effect
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[0021] The detailed content of the present invention and its specific implementation will be further described below in conjunction with the accompanying drawings.
[0022] see figure 1 , the in-situ pressure / scratch testing device of the present invention includes a precision positioning platform in X and Y directions, a precision linear positioning platform in Z direction, a precision pressing drive unit, a load signal detection and a displacement signal detection unit, wherein the X, The precision positioning platform in the Y direction is fixed on the base 13 through the connecting plate II3, and the stage 5 is connected with the precision positioning platform in the X and Y directions through the piezoelectric stacks 17 and 14 in the X and Y directions. The piezoelectric stacks 17 and 14 in the X and Y directions on the precision positioning platform are directly driven to realize precise movement in the X and Y directions. The diamond indenter 6 is fixedly connected wit...
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