Inchworm type multi-degree of freedom piezoelectric driving device

Abstract

The invention relates to an inchworm type multi-degree of freedom piezoelectric driving device and belongs to the field of precise processing. A rotor unit of the device comprises a B type piezoelectric stack which is along a rotor and embedded into the rotor, the stepping linear motion of the rotor can be achieved by the aid of the B type piezoelectric stack, an upper layer clamping unit is composed of an A type piezoelectric stack, an A type wedge block, a B type wedge block and a stator upper layer substrate which is provided with a three-claw self-centering flexible hinge, in a power-on state, the piezoelectric stacks enable the rotor to be clamped with the stator upper layer substrate, a lower layer claming unit is composed of an A type piezoelectric stack, an A type wedge block, a B type wedge block and a stator lower layer substrate which is provided with a three-claw self-centering flexible hinge, in the power-on state, the piezoelectric stacks enable the rotor to be fastened with the stator lower layer substrate, a rotating piezoelectric driving unit is composed of a B type piezoelectric stack and a drive indentation for fixing the B type stack, and the stepping rotating motion of the rotor can be achieved by the aid of the rotating piezoelectric driving unit. The stator upper and lower layer substrates are connected through a thin-wall flexible hinge. The inchworm type multi-degree of freedom piezoelectric driving device has the advantages that the accuracy is high, the centring is good, the output load is large, the stroke is large, the cost is low, and the like.

Description

technical field [0001] The invention relates to the field of mechatronics, in particular to a high-precision inchworm-type multi-degree-of-freedom piezoelectric drive device that integrates linear and rotary outputs. It can be applied to high-tech scientific and technological fields such as ultra-precision machining, precision engineering, micro-electromechanical systems (MEMS), micro-robots, semiconductor manufacturing, biomedicine, and aerospace. Background technique [0002] With the continuous development of modern science and technology, human research on the microscopic field is getting deeper and deeper. Especially in the fields of ultra-precision machining, micro-electromechanical systems (MEMS), and micro-robots, the requirements for precise positioning and micro-displacement are getting higher and higher. Traditional driving devices, such as ordinary motors, screw nuts, worm gears and other macroscopic large-scale driving devices, can no longer meet their precisio...

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to provide an inchworm-type multi-degree-of-freedom piezoelectric drive device, which solves the problems of large structural size of the current drive, unstable load output, small output stroke and low precision.

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