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Sapphire crystal growth furnace leakage alarm system

A sapphire crystal and alarm device technology, applied in crystal growth, post-processing devices, post-processing, etc., can solve problems such as poor electrical conductivity of alumina, impractical fusing alarms, and inability to guarantee the safety protection of sapphire crystals, and achieve safety protection capabilities Effect of upgrading and improving service life

Inactive Publication Date: 2013-03-06
WUJIANG YATAI VACUUM EQUIP TECH
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

For sapphire crystal growth furnaces, the temperature of alumina is far lower than the temperature of the thermal field around the crucible, and the fusing alarm is not practical; while alumina has poor conductivity and is affected by volatiles in the furnace, short circuit alarms are not ideal. s Choice
Therefore, the use of traditional alarm methods cannot guarantee the safety protection of sapphire crystal growth.

Method used

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  • Sapphire crystal growth furnace leakage alarm system
  • Sapphire crystal growth furnace leakage alarm system

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Embodiment Construction

[0010] figure 1 and figure 2 As shown, the sapphire crystal growth furnace includes a crystal growth furnace 1, a tungsten crucible 2, a crucible support 3, a lower heat shield 4, a lower heating element 5, a charging tank 6, a lower furnace cover 7 and a lifting mechanism 8. The leakage alarm device of the sapphire crystal growth furnace includes a charging tank 6 , a charging tank pillar 9 , a pressure sensor 11 and a data signal line 10 . The storage trough 6 is placed on the lower heat shield 4 and under the lower heating element 5. It is a circular container with a groove on the edge for containing leaking alumina. The inner diameter is larger than the outer diameter of the tungsten crucible and the net length of the lower heating element. The trough 6 is supported on the lower furnace cover 7 by three trough pillars 9, and the trough pillar 9 is made of tantalum rods with a diameter of 10mm. Three pressure sensors 11 are placed between the lower furnace cover 7 and th...

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Abstract

The invention discloses a sapphire crystal growth furnace leakage alarm system, which comprises a container, container supports, pressure sensors and data signal cables. The sapphire crystal growth furnace leakage alarm system can further upgrade the safety protection capability of a sapphire crystal growth furnace, thus greatly prolonging the service life of the equipment and improving safety protection for operators.

Description

technical field [0001] The invention relates to the processing and manufacture of a sapphire crystal growth furnace, in particular to a furnace leakage alarm device for a sapphire crystal growth furnace. Background technique [0002] At present, sapphire crystal growth furnaces generally use a double-layer water-cooled shell as the furnace shell, and a heat shield is installed inside, and a heating element and a tungsten crucible are placed inside the heat shield. Due to the high working temperature, it can reach 1500-2200 degrees Celsius, and ordinary materials are difficult. To withstand such a high temperature, tungsten and molybdenum materials are generally used as the thermal field material of the crystal growth furnace. In the crystal growth furnace, the tungsten crucible is a container for containing raw materials. It is generally pressed and formed by powder metallurgy, and the conditions for use are achieved through sintering. Although the performance of the crucibl...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C30B35/00
Inventor 滑喜宝
Owner WUJIANG YATAI VACUUM EQUIP TECH