Micro-particle weighing sensor of V-shaped folding cantilever beam structure

A weighing sensor and cantilever beam technology, which is applied in the field of micro-particle weighing sensors, can solve the problems of large errors, achieve high sensitivity, high measurement accuracy, and reduce the uncertainty of the measured object.

Inactive Publication Date: 2013-03-06
DALIAN UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The proposed micromass sensor has the characteristics of high sensitivity, accurate positioning and high measurement accuracy, which effectively solves the

Method used

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  • Micro-particle weighing sensor of V-shaped folding cantilever beam structure
  • Micro-particle weighing sensor of V-shaped folding cantilever beam structure
  • Micro-particle weighing sensor of V-shaped folding cantilever beam structure

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0039] figure 1 A schematic diagram of the structure of a microparticle load cell with a V-shaped folded cantilever beam structure is given. Wherein, the lower surface of the piezoelectric film 2 is connected to the upper surface of the V-shaped folded cantilever beam 3, and one section of the piezoelectric film 2 and the folded beam is connected to the fixed block 1, and the other end is suspended to form a composite cantilever beam structure. There is no gap connection between the piezoelectric film 2 and the V-shaped folded cantilever beam, and the length of the piezoelectric film 2 is smaller than that of the folded cantilever beam 3 . Bounded by the free end of the piezoelectric film 2, the composite cantilever beam structure is divided into two parts: the composite layer and the extension layer. The folding cantilever beam 3 is a high elastic material.

[0040] Calculation example 1: Under the same geometric parameters (as shown in Table 1), the sensitivity comparison ...

Embodiment 2

[0044] image 3 It is a structural schematic diagram of Embodiment 2 of a microparticle load cell with a V-shaped folded cantilever beam structure in the present invention. On the basis of Embodiment 1, the folded cantilever beam with a single V-shaped groove is replaced by a folded cantilever beam with multiple V-shaped grooves in succession, which can be used for continuous measurement of various substances.

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Abstract

The invention discloses a micro-particle weighing sensor of a V-shaped folding cantilever beam structure, belonging to the field of a precise particle mass detection sensor. A micro mass sensor comprises a fixed block, a V-shaped folding cantilever beam structure and a piezoelectric thin film, and is characterized in that the upper surface of the V-shaped folding cantilever beam connected to the fixed block is connected with the piezoelectric thin film, wherein the top or tops of a single or a plurality of V-shaped folding grooves which are arranged along the axis is or are used as a main detection point or main detection points; and the mass of a detected object is accurately calculated through data output of the piezoelectric thin film. The rigidity and the effective mass distribution state of the sensor are effectively changed through introduction of the V-shaped folding cantilever beam, so that the detection sensitivity of the sensor is greatly improved. Specific examples show that the sensitivity can be improved by 227 percent compared with the conventional sensor of the rectangular section cantilever beam structure. The micro mass sensor has the characteristics of simple structure, accuracy in positioning of the detected object, high sensitivity and the like, so that the sensor can be widely applied to detection of atoms, fine particles, environmental dust and microbial cells such as bacteria or viruses.

Description

technical field [0001] The invention relates to a microparticle weighing sensor with a V-shaped folded cantilever beam structure, which belongs to the field of precision particle quality detection sensors and is mainly used for atomic weighing, microparticle measurement, detection and identification of microbial cells such as environmental dust and bacteria or viruses . Background technique [0002] The piezoelectric resonant micromass sensor mainly detects the material composition by measuring the structural resonance frequency change caused by the mass of the material attached to the sensor surface. The basic principle can be expressed by the following formula, Δf i =-f i Δm / M e , where f i is the i-th resonant frequency of the sensor, M e is the equivalent mass of the cantilever beam, ?m is the added mass per unit area, ?f i Changes in the resonant frequency of the sensor for increasing mass µm. It can be seen from this that the resonant frequency f of the key elast...

Claims

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Application Information

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IPC IPC(8): G01G3/16G01N5/02
Inventor 高仁璟赵剑张延康朱传月张莹魏岩
Owner DALIAN UNIV OF TECH
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