Method for forming semiconductor integrated device
A technology of integrated devices and semiconductors, which is applied in the field of semiconductor integrated device formation, can solve the problems of many process steps and low integration, and achieve the effects of reducing costs, saving processes, and improving process integration
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[0025] When the split-gate flash memory and the polysilicon resistor are formed by the existing process, the split-gate flash memory and the polysilicon resistor are manufactured separately, that is, the split-gate flash memory is formed in a designated area, and then the split-gate flash memory A mask layer is formed on the surface, and then polysilicon resistors are formed in other areas. However, since the production of the split-gate flash memory requires the deposition of multiple polysilicon layers to form control gates, floating gates or word lines, after the split-gate flash memory is formed, the multi-layer polysilicon layers in other regions are etched away, and then Forming another polysilicon layer to make polysilicon resistors causes waste of materials and increases in process steps.
[0026] Therefore, the embodiment of the present invention provides a method for forming a semiconductor integrated device. A first sidewall is formed on the sidewall of a first opening...
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