Wave surface separation and defocusing based phase retrieval wavefront analyzer and analytical method thereof

Abstract

The invention discloses a wave surface separation and defocusing based phase retrieval wavefront analyzer and an analytical method of the wave surface separation and defocusing based phase retrieval wavefront analyzer. The wavefront analyzer is composed of a microlens array and a charge coupled device (CCD) camera. The wavefront analyzer is characterized in that the CCD camera is located at a position deviated from the focal plane of the microlens array. The analytical method comprises the following steps: firstly, spot diagrams are obtained through the CCD camera; secondly, noise removal, image center location, strength estimation and other pretreatments are performed for the obtained spot diagrams; and thirdly, phase retrieval is performed, phase information is optimized through a plurality of times of loop iteration, and eventually emerging wavefront and incident wavefront are optimized. The wave surface separation and defocusing based phase retrieval wavefront analyzer and the analytical method of the wave surface separation and defocusing based phase retrieval wavefront analyzer overcome the shortcomings of a wavefront analyzer in the prior art, the wave surface separation and defocusing based phase retrieval wavefront analyzer is utilized to perform wavefront analysis, and the wavefront analysis is high in precision, wide in measuring range, and strong in anti-noise capacity. The wave surface separation and defocusing based phase retrieval wavefront analyzer and the analytical method of the wave surface separation and defocusing based phase retrieval wavefront analyzer is convenient to use, and can be widely used for wavefront analysis performed in various optical detections.

Description

technical field [0001] The invention belongs to the field of optical technology, and relates to a novel wavefront analyzer, in particular to wavefront analysis using a phase recovery technology based on wavefront segmentation and defocusing. The wavefront analyzer can be used for high-precision wavefront analysis, Optical system inspection and optical surface flatness inspection, etc. The invention also relates to the analysis method of the phase recovery wavefront analyzer based on wavefront division and defocusing. Background technique [0002] Wavefront analysis is an important research direction in the field of optics. By analyzing the intensity information of light waves, the phase information of light waves, that is, wavefront information, is obtained. In metrology, it is often used to detect the flatness of optical surfaces and small defects. [0003] Before the advent of adaptive optics, interference technology and phase recovery technology were mainly used for wav...

AI Technical Summary

Problems solved by technology

Relatively complex, and the dynamic range is closely related to the distance from the focus

The shearing interferometer is essentially an interference technique, and at least two detectors are required to perform shearing interference in two directions respectively. The operation is more complicated and the hardware requirements are relatively high.

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