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Rapid polishing method for movable baffles

A mobile baffle and fast technology, applied in the field of rapid polishing, can solve problems affecting the stability of semiconductor production equipment, high procurement costs of related parts, and surface deterioration of parts, etc., to achieve extended service life, low risk of abnormalities, and reduced crashes The effect of chance

Active Publication Date: 2013-05-08
湖州科秉电子科技有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Due to long-term use of the mobile baffle, the surface of the parts will gradually deteriorate, which will affect the stability of semiconductor production equipment over time; when this situation occurs, most of the processing methods are "scrap parts, new product purchases" The way
[0003] As we all know, the components related to semiconductor production equipment are all imported from abroad, and there is no domestic manufacturing capacity. Relatively, the procurement cost of related components is naturally high, and because they are imported from abroad, the procurement time is long. , when a large number of purchases are required, the huge cost of money and time is a heavy burden

Method used

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Embodiment Construction

[0018] The present invention will be further described below in conjunction with embodiment:

[0019] The present invention is used for the fast polishing method of moving baffle, comprises the following steps:

[0020] a. Use a sandblasting machine to spray the entire movable baffle, and the sprayed sand is alumina sand, and use sandblasting to evenly repair the scars on the surface of the mobile baffle due to multiple uses;

[0021] b. Use sandpaper to make preliminary repairs on the surface of the movable baffle to make the surface scars uniform;

[0022] c. Use abrasive cloth to recondition the surface of the moving baffle to make the surface scars more uniform;

[0023] d. Repeat steps b and c until the scars on the surface of the moving baffle disappear;

[0024] e. Use polishing agent to mirror the surface of the mobile baffle until the surface is as bright as new.

[0025] The above embodiments are only for the purpose of illustrating the present invention, rather t...

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PUM

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Abstract

The invention relates to a rapid polishing method for a movable baffle. The method includes spraying the entire movable baffle by means of abrasive blasting; trimming scratches evenly on the surface of the movable baffle; performing a primary trim on the surface of the movable baffle by abrasive paper, performing a secondary trim on the surface of the movable baffle by grinding cloth, and repeating the primary trim and the secondary trim until scratches on the surface of the movable baffle disappear; and performing mirror-surface treatment on the surface of the movable baffle until the surface becomes as bright as a new mirror surface. The rapid polishing method is simple to operate and the polishing process is simple. The movable baffle processed by the method can meet the using requirements and reduce failure probability of production equipment. The rapid polishing method can prolong service life of the movable baffle, and reduce time and money cost spent in discarding used products and purchasing new products.

Description

technical field [0001] The invention relates to a rapid polishing method for a moving baffle. Background technique [0002] The mobile baffle is one of the key core parts common in semiconductor thin film process equipment. Due to long-term use of the mobile baffle, the surface of the parts will gradually deteriorate, which will affect the stability of semiconductor production equipment over time; when this situation occurs, most of the processing methods are "scrap parts, new product purchases" The way. [0003] As we all know, the components related to semiconductor production equipment are all imported from abroad, and there is no domestic manufacturing capacity. Relatively, the procurement cost of related components is naturally high, and because they are imported from abroad, the procurement time is long , When a large number of purchases are required, the huge cost of money and time is a heavy burden. [0004] Therefore, what kind of polishing method to adopt to ach...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B24B1/00
Inventor 徐国栋
Owner 湖州科秉电子科技有限公司
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