Terahertz time-space resolution imaging system, imaging method and application thereof

Abstract

The invention relates to a terahertz time-space resolution imaging system. The system comprises a sample placing frame, a detection crystal, a pump light generator, a terahertz light generator, a detection light generator and an imaging device, wherein the detection crystal is located at one side of an exit surface of the sample placing frame; the pump light generator is used for generating a pump light to illuminate a test sample; the terahertz light generator is used for generating a terahertz light to illuminate the test sample, illuminating the detection crystal after acquiring information of the test sample and modulating an index ellipsoid of the detection crystal; the detection light generator is used for generating a detection light to illuminate the detection crystal, detecting the index ellipsoid of the detection crystal and indirectly acquiring the information of the test sample; and the imaging device is located into a light path after the detection light passes through the detection crystal and is used for collecting a terahertz image of the test sample. According to the terahertz time-space resolution imaging system, a terahertz focal plane imaging technique is introduced into a terahertz time resolution spectral measurement system, the time-space resolution imaging measurement on a luminescent property of the test sample is realized, the four-dimensional spectral information is acquired, and the comprehensive and accurate observation on a time-space evolution process of the luminescent property of the test sample is realized.

Description

technical field [0001] The invention relates to the field of optics, in particular to a terahertz space-time resolution imaging system, an imaging method and an application thereof. Background technique [0002] With the development of semiconductor manufacturing technology and materials, electronic chips have higher computing speed, smaller area and lower cost. Since the phase transition process of a semiconductor under external excitation is determined by its carrier transport characteristics, the study of carrier transport phenomena is the basis for the development of semiconductor devices. Terahertz (THz for short) pulse technology, as a unique far-infrared measurement method, has demonstrated its important application potential in current scientific research and industrial detection. Especially in the study of the characteristics of semiconductor carriers, because terahertz pulses have the characteristics of low photon energy and narrow pulse width, they will not have ...

AI Technical Summary

Problems solved by technology

These processes lead to inhomogeneity in the overall optical properties of the semiconductor

However, although the traditional terahertz time-resolved spectroscopy technology has many advantages, due to the limitation of its measurement method, the terahertz spot needs to be focused on a point on the sample for detection, so it only reflects the time-domain variation characteristics of the carriers. It cannot show the spatial distribution characteristics of carriers due to diffusion and drift phenomena

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