A high-efficiency crystal chamfering machine and chamfering method

Abstract

The invention relates to a highly efficient crystal edge chamfering machine and an edge chamfering method of the highly efficient crystal edge chamfering machine, and belongs to the technical field of the electrical industry wafer processing. The technical scheme includes that a rotation body (5) is arranged on a supporting shaft (4); 5-degree wave form barrel (8) is arranged in a barrel body shaft (6), a 5-degree angle is reserved between the axis of the wave form barrel and the axis of the barrel body shaft; the axis of the barrel body shaft is parallel to the axis of the supporting shaft, one end of the barrel body shaft is arranged on a rotation body, the other end of the barrel body shaft is connected with the supporting shaft through the rotation body and a gear combination; the supporting shaft is driven to rotate by external force, the rotation body is driven to rotate along with the supporting shaft, and the barrel body shaft is driven by the rotation body to together rotate around the supporting shaft; and the gear combination on the supporting shaft is driven through gears to drive the barrel body shaft to auto-rotate, and edge chamfering of wafers in the 5-degree wave form barrel is finished. The highly efficient crystal edge chamfering machine and the edge chamfering method of the highly efficient crystal edge chamfering machine have the advantages that the large centrifugal force effect can be well born, rotation speed reaches 500 r / min, and therefore fault rate is reduced greatly, noises are reduced, production efficiency is increased by more than five times, and the highly efficient crystal edge chamfering machine is stable and reliable to run.

Description

technical field [0001] The invention relates to a high-efficiency crystal beveling machine and a beveling method, belonging to the technical field of wafer processing in the electrical industry. Background technique [0002] At present, with the rapid development of the electronics industry, the market demand for quartz crystal materials is increasing rapidly, which puts forward higher requirements for product quality. Background Art Ordinary edge beveling machine 5o wave cylinder two ends of the shaft head are directly installed on the rotating body, and the rotation is realized by the adjustment of its own center of gravity. Due to the effect of centrifugal force and the limitation of the structure, the speed of the rotating body cannot exceed 200 rpm. The speed of the rotating body, after running for a period of time, causes the corrugated cylinder to break. Therefore, under the condition of limited speed, it cannot generate enough centrifugal force, so that the wafer is ...

AI Technical Summary

Problems solved by technology

Background Art Ordinary edge beveling machine 5o wave cylinder two ends of the shaft head are directly installed on the rotating body, and the rotation is realized by the adjustment of its own center of gravity. Due to the effect of centrifugal force and the limitation of the structure, the speed of the rotating body cannot exceed 200 rpm. The speed of the rotating body, after running for a period of time, causes the corrugated cylinder to break. Therefore, under the condition of limited speed, it cannot generate enough centrifugal force, so that the wafer is ground together with the grinding material in the corrugated cylinder, and the high-efficiency beveling cannot be achieved. Purpose, and due to the low speed of the rotating body, the movement of wafers and grinding materials in the corrugated cylinder is not sufficient and uneven, so the quality is poor, resulting in an increased reject rate

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