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Displacement measurement method

A displacement measurement and displacement technology, which is applied to measurement devices, instruments, optical devices, etc., can solve problems such as the inability to determine the direction of displacement in real time, and achieve the effect of simple method and broad application prospects.

Inactive Publication Date: 2015-08-12
TSINGHUA UNIV
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  • Abstract
  • Description
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  • Application Information

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Problems solved by technology

However, in the traditional measurement method of using laser feedback to measure displacement, high and low light intensity points are used to count to calculate the magnitude of displacement, but it is impossible to determine the direction of displacement in real time

Method used

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Embodiment Construction

[0015] The displacement measurement method provided by the present invention will be described in detail below in conjunction with the accompanying drawings.

[0016] Please also refer to figure 1 , figure 2 and image 3 , the embodiment of the present invention provides a kind of displacement measuring method, described displacement measuring method comprises the following steps:

[0017] S1, providing a displacement measurement system, the displacement measurement system includes a laser 100 and a data acquisition and processing unit 200, the laser light output by the laser 100 is divided into o-light and e-light components with phase difference;

[0018] S2, the data acquisition and processing unit 200 converts the light intensity signal of the o light into a voltage signal V o , convert the light intensity signal of the e light into a voltage signal V e , and calculate the sum of the light intensity of o light and e light to get the total power tuning curve V t , whe...

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Abstract

The invention provides a displacement measuring method. The displacement measuring method includes: providing a displacement measuring system, wherein the displacement measuring system comprises a laser and a data acquiring and processing unit, and laser light output by the laser is divided into an o-light component and an e-light component with phase difference; via the data acquiring and processing unit, converting a light intensity signal of o-light into a voltage signal Vo, converting a light intensity signal of e-light into a voltage signal Ve, seeking a sum of light intensity of the o-light and the e-light so as to obtain a total power tune curve Vt, wherein Vt=V0+Ve; and judging a direction: seeking difference Delta (Vt) of the signal Vt, and calculating I, wherein I=Delta (Vt) x (Vo-Ve), when the value of I is larger than 0, the direction of the displacement is judged to be the first direction, when the value of I is smaller than 0, the direction of the displacement is judged to be the second direction, and the first direction and the second direction are opposite.

Description

technical field [0001] The invention relates to a displacement measurement method, in particular to a measurement method for real-time judgment of displacement. Background technique [0002] Nano-measurement is the basis for the development of nano-science, and nano-science is mainly to study, discover and process materials, devices and systems with a structure size smaller than 100 nanometers to obtain the required functions and performances, and has been used in materials, chemistry, biology, energy It has been widely used in medical and health fields. With the advent of the nanometer era, the demand for the detection of nanoscale products is increasing, and at the same time, higher requirements are put forward for nanometer measurement technology. Nano-measurement needs to achieve nanometer-level resolution within the millimeter-level measurement range, and at the same time, it is necessary to comprehensively consider the requirements of environmental conditions, system ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/02
Inventor 张书练牛海莎谈宜东
Owner TSINGHUA UNIV
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