Terahertz waveguide cavity filter

Abstract

The invention relates to a terahertz waveguide cavity filter composed of an upper cavity located at the upper portion and a lower cavity located at the lower portion in stacking mode. The upper cavity is sealed on the lower cavity, and a waveguide cavity with a hollow-out structure is arranged at the combining position of the upper cavity and the lower cavity and is located in the lower cavity. A third resonant cavity is connected with a waveguide output section in series through a fifth sensitive coupling window. A waveguide input section, a first sensitive coupling window, a first resonant cavity, a third sensitive coupling window, a second resonant cavity, a second sensitive coupling window and the waveguide output section are sequentially connected in series to form a coupling path to serve as a main signal channel. The waveguide input section, a fourth sensitive coupling window, a third resonant cavity, a fifth sensitive coupling window and the waveguide output section are sequentially connected in series to form a second coupling path for forming a transmission zero point at the passband low end. The terahertz waveguide cavity filter has the advantages that a passband of the waveguide cavity filter is in a frequency range of 380-390GHz, communication and the like under specified conditions can be achieved by utilizing an atmospheric absorption window in the frequency range.

Description

technical field [0001] The invention belongs to the technical field of terahertz passive devices, in particular to a WR2.2 (cross-sectional area of ​​0.56mm×0.28mm) rectangular waveguide cavity band-pass filter suitable for 325-500GHz frequency band based on bulk silicon etching process device. Background technique [0002] Terahertz frequency generally refers to the electromagnetic frequency band in the range of 300GHz to 3000GHz. It is located between the microwave frequency band (300MHz to 300GHz) and the infrared frequency band. It is limited to the technical level and has not been used in the past. It has become a Terahertz gap (Terahertz Gap). Due to the increasingly crowded electromagnetic spectrum, the spectrum resources below 300 GHz have been exhausted, and this "blank" needs to be utilized urgently. In recent years, with the advancement of technology, research on devices and systems suitable for terahertz frequency bands has been carried out, and terahertz filter...

AI Technical Summary

Problems solved by technology

At present, in the terahertz frequency band, the traditional planar circuit filter cannot be used due to its high dielectric loss; the pure metal waveguide circuit cannot be realized by traditional metal processing technology due to its fine structure; other photonic crystal structure filters lack versatility, so There is also a lack of mature and versatile filter forms

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