Ultraviolet laser processing device

Abstract

The invention discloses an ultraviolet laser processing device which comprises an ultraviolet laser, a galvanometer system and a focusing lens. A beam split sheet is arranged on a light path between the ultraviolet laser and a galvanometer X, a coaxial visual system is further arranged above the beam split sheet, and a coaxial power source is arranged on one side of workpieces to be processed; ultraviolet laser beams emitted by the ultraviolet laser are horizontally emitted to the beam split sheet, transmitted by the beam split sheet, totally reflected by the galvanometer system, refracted by the focusing lens, and finally gathered to the workpieces to be processed; and light emitted by the light source is projected to the workpieces to be processed, then sequentially refracted by the focusing lens, and totally reflected by the galvanometer system to form parallel light, then the parallel light is emitted to the beam split sheet, totally reflected by the beam split sheet and finally captured and imaged by the coaxial visual system, and an industrial control computer regulates a deviation angle of the galvanometer X and a galvanometer Y in the galvanometer system according to imaging data. The ultraviolet laser processing device is high in processing accuracy and capable of accurately marking and cutting the workpieces to be processed.

Description

[technical field] [0001] The invention relates to the technical field of laser processing, in particular to an ultraviolet laser processing device. [Background technique] [0002] Laser micromachining refers to the process of product processing (marking, cutting) with a size of several to more than 1,000 microns. It is a branch of laser processing and has been widely used in various industries. It mainly uses high energy density The laser beam directly ablates, carbonizes, and engraves the material. The surface of the material absorbs the energy of the laser and then carbonizes, melts, and gasifies to achieve the purpose of processing. The main features are high laser energy, high efficiency, good effect, and low cost. Environmental protection and other advantages. [0003] With the advancement of science and technology, the diameter of the focused spot of the ultraviolet laser can reach 0.005MM, and the processing accuracy is greatly improved. However, the traditional lase...

AI Technical Summary

Problems solved by technology

[0003] With the advancement of science and technology, the diameter of the focused spot of the ultraviolet laser can reach 0.005MM, and the processing accuracy is greatly improved. However, the traditional laser positioning method (manual or machine fixture positioning accuracy of 0.05MM and above) is difficult to meet the marking and cutting of products. Accuracy requirements, for example, in the processing of non-metal deburring, the accuracy requirements are within 0.03MM, so the positioning of ordinary lasers cannot meet

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