Two-degree-of-freedom high-speed parallel scanning platform and perpendicularity error calibration method thereof

Abstract

The invention relates to a two-degree-of-freedom high-speed parallel scanning platform and a perpendicularity error calibration method thereof. The two-degree-of-freedom high-speed parallel scanning platform comprises a shell, and a linear driving mechanism, a reflector shaft mechanism, a joint bearing and a phase-sensitive detector (PSD) position sensor which are arranged in the shell. The two-degree-of-freedom high-speed parallel scanning platform provided by the embodiment has a single reflector structure, the scanning operation can be finished through one-step reflection only, and the error amplification effect brought by the double-mirror reflection is avoided; meanwhile, by adoption of a two-input two-output structure, the two-degree-of-freedom high-speed parallel scanning platform is easily controlled compared with the prior art; by adoption of a joint bearing structure, the scanning platform can have high rigidity and a large deflection angle; and because the two-dimensional PSD position sensor serves as a feedback device of the normal position of a reflector, a full closed loop is realized, and the high precision can be achieved. The two-degree-of-freedom high-speed parallel scanning platform has the characteristics of high precision, high rigidity and high bearing capacity.

Description

technical field [0001] The invention relates to the field of precision optical scanning instruments, in particular to a two-degree-of-freedom high-speed parallel scanning platform and a method for calibrating its verticality error. Background technique [0002] The optical scanning mechanism is a servo actuator in the field of advanced laser processing and one of the key components of laser projection. [0003] In recent years, parallel mechanisms with few degrees of freedom, especially three-degree-of-freedom parallel mechanisms, such as 3RPS parallel mechanisms, have received more and more attention and favor from researchers in the field of optical scanning. The existing optical scanning angle adjustment platform based on parallel mechanism simultaneously drives three motion branch chains connected between the moving platform and the base through three drivers, so as to realize the movement of the moving platform in three rotational degrees of freedom, or two rotational ...

AI Technical Summary

Problems solved by technology

The advantages of the first structure are good structural rigidity, strong bearing capacity, and a wide range of rotation angles; its disadvantages are that it requires high precision for the shaft system, and the moment of inertia and frictional moment of the system are too large, which is not conducive to the improvement of the resonance frequency. The volume of this structure is too large, and it is severely limited by space

The second structural advantage is: simple structure, no frictional resistance torque, and fast response speed; but its disadvantage is that the requirements for elastic elements are high, that is, the elastic elements are required to have sufficient flexibility in the desired direction of movement, while in restricting movement It has sufficient rigidity in the direction, which makes the movement form of the plane mirror more complicated when the system is working (it will produce a small amount of linear displacement while generating the angular movement), and is not suitable for use under harsh working conditions such as vibration, impact, and rotation.

In addition, in order to make the structural design symmetrical, the above two structures both use four sets of motors distributed in twos and twos orthogonally, that is, four inputs are used to control two outputs, which makes the control more complicated and the cost is higher

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