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Vacuum processing apparatus

A vacuum processing device and vacuum processing chamber technology, applied in vacuum evaporation plating, ion implantation plating, coating, etc., can solve problems such as unfavorable production efficiency and cost increase, and achieve improved maintainability, easy installation, and reduced effect of weight

Active Publication Date: 2015-02-04
ULVAC INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Therefore, a high-performance pump is required to evacuate the interior, which leads to an increase in cost. In addition, it takes time to evacuate, which is also detrimental to production efficiency.

Method used

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  • Vacuum processing apparatus
  • Vacuum processing apparatus
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Embodiment Construction

[0025] Hereinafter, referring to the drawings, the vacuum processing apparatus of this embodiment will be described by taking a case where a multilayer film is formed on one surface of a sheet-shaped substrate S using a cathode unit for sputtering film formation as a processing unit as an example. As the sheet-shaped base material S, a resin material or the like that differs depending on the application can be used.

[0026] refer to Figure 1 to Figure 4 , SM is the vacuum processing device of this embodiment. The vacuum processing apparatus SM has, for example, a central vacuum processing chamber 1 evacuated by a vacuum pump (not shown) such as a cryopump, and the upstream side of the vacuum processing chamber 1 ( figure 1 The vacuum auxiliary chamber 2 that is connected to the left side of the figure) and evacuated by a vacuum pump not shown, and the downstream side of the vacuum processing chamber 1 ( figure 1 Another vacuum auxiliary chamber 3 connected to each other an...

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Abstract

Provided is a vacuum film-forming apparatus, which has a vacuum processing chamber and auxiliary vacuum chambers separately configured to be convenient for transport and the like, and which is easily assembled at an installation site, and has excellent maintainability. The vacuum film-forming apparatus is configured by consecutively installing: a vacuum processing chamber (1), which has a drum (15) having a part of a long sheet-like base material (S) wound thereon, a plurality of rollers (16c), which are disposed below the drum and transfer the sheet-like base material from the upstream, and a processing unit (4); an upstream auxiliary vacuum chamber (2) that feeds the sheet-like base material to a vacuum processing chamber; and a downstream auxiliary vacuum chamber (3) that takes up and recovers the sheet-like base material. The vacuum processing chamber and the auxiliary vacuum chambers are respectively demarcated by disposing bottom-opened box bodies with the bottom side on the base plates, which are placed on mounts disposed on the floor surface. The rollers are configured as an integrated roller unit, and are removably provided in a space below the drum in the vacuum processing chamber.

Description

technical field [0001] The present invention relates to a vacuum processing apparatus which conveys long sheet-like substrates through a vacuum processing chamber in which prescribed treatments are applied to the sheet-like substrates. Background technique [0002] Since the sheet-like base material made of elongated resin is elastic and has good processability, it is generally known to form a predetermined thin film such as a predetermined metal film or oxide film on its surface, or perform heat treatment to make an electronic component. or optical components. [0003] Conventionally, as a vacuum processing apparatus for performing predetermined processing on such a sheet-shaped substrate in a vacuum, it is known to have a vacuum processing chamber having a cooling roller and a processing unit (cathode unit for sputtering film formation). ), a part of the long sheet substrate is wound on the cooling drum, the processing unit is arranged around the cooling drum, and a vacuu...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/56
CPCH01J37/32788C23C14/3407H01J2237/3325H01J37/32458H01J37/32743C23C14/562C23C14/3464H01J37/32761H01J37/32752C23C14/56
Inventor 藤本信也林信博广野贵启多田勋
Owner ULVAC INC
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