Image-vision-based automatic calibration method of clean robot

Abstract

The invention discloses an image-vision-based automatic calibration method of a clean robot. The automatic calibration method comprises the following steps: a, placing a robot to be calibrated below a camera to enable an original point of a robot body coordinate system to be radiated by laser; b, acquiring the position of an optical center of the laser transmitted by a laser transmitter; c, acquiring a position transformational matrix T between the original point of the optical center of the laser and the robot body coordinate system; d, operating the mechanical arm of the robot, and acquiring the position of a farthest end point of a tray; e, calculating deviation between each practical moment and a design value; and f, converting the deviation into the robot body coordinate system through the position transformational matrix T, and recording the converted deviation data into a robot motion control module. When the automatic calibration method is used, the measurement precision can be 0.2 mm, and the accurate calibration of the mechanical arm is realized; and in addition, the automation degree is high, the measurement and the calibration are completely accomplished by a computer and are finally stored in the robot motion control module.

Description

technical field [0001] The invention belongs to the field of automatic processing of semiconductors, and mainly relates to an automatic calibration method for a cleaning robot based on image vision. Background technique [0002] The integrated circuit (IC) is the core of the electronic information industry and one of the most important high-tech technologies that promote the development of national economy and social informatization. In the Tenth Five-Year "863" plan, the country included integrated circuit manufacturing equipment in major special plans, realizing partial breakthroughs in my country's integrated circuit manufacturing equipment and leapfrog development of the IC equipment industry. Clean robot is an important part of IC manufacturing equipment, which can realize the automatic transfer of wafers. Wafers are easily broken, which requires the robot arm together with the wafer tray to achieve high-precision positioning. However, due to manufacturing process and a...

AI Technical Summary

Problems solved by technology

This method requires the installation of sensing elements on the mechanical arm. For a clean robot, the installation of sensing elements destroys the clean environment. In addition, the sensing element acts as a load to change the mechanical characteristics of the robotic arm and the motion parameters of the servo control motor. There is an error in the calibration

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