Silicon-glass micro pressure sensor chip of island membrane self-packaging structure and manufacturing method

Abstract

The invention provides a silicon-glass micro pressure sensor chip of an island membrane self-packaging structure and a manufacturing method, and relates to a micro pressure sensor. The silicon-glass micro pressure sensor chip of the island membrane self-packaging structure and the manufacturing method are not only high in reliability but also suitable for severe environments of moist, acid-base, static electricity and the like. The silicon-glass micro pressure sensor chip of the island membrane self-packaging structure is provided with a pressure sensing membrane and a base provided with a cavity; the pressure sensing membrane is of an obverse side island membrane composite structure, four voltage dependent resistors are arranged in a concentration area with the maximum stress of the island membrane composite structure, the four voltage dependent resistors form a Wheatstone bridge through metal electrodes, a silicon-glass anodic bonding process is adopted to enable the Wheatstone bridge to be sealed in a sealed absolute pressure cavity, and the Wheatstone bridge enables an interface preset electrode to be connected with external testing equipment through metal leads to form a complete pressure sensitive and measuring system. The manufacturing method comprises the steps of technological manufacturing of an SOI wafer; manufacturing of a substrate part; bonding and follow-up processes.

Description

technical field [0001] The invention relates to a micro pressure sensor, in particular to a silicon-glass micro pressure sensor chip with an island membrane self-encapsulation structure and a manufacturing method. Background technique [0002] In various application fields of sensors, temperature, flow, pressure, and position are the most common test parameters. [0003] Among all kinds of sensors, because the pressure sensor can be widely used in the measurement and control of pressure, height, and liquid flow, flow velocity, liquid level, and pressure, it has become a type of sensor with the most mature sensor technology and stable performance ratio. According to the Japan Electric Measuring Instrument Industry Association's statistics on the production and sales of process sensors (temperature, flow, pressure, position, density, etc.), pressure sensors account for more than one-third of the entire process sensors, and their proportion is still high. Continue to increase,...

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This solution not only increases the manufacturing cost, but also the temperature change will cause the expansion

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