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Laser feedback interferometer

A technology of laser feedback and interferometer, which is applied in the direction of instruments, scientific instruments, and measurement optics, can solve problems such as the inability to realize multi-coordinate, multi-degree-of-freedom measurement, and achieve the effect of improving accuracy and stability

Inactive Publication Date: 2013-09-11
TSINGHUA UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, current feedback interferometers can only output a single beam of light for single-degree-of-freedom measurement, and cannot achieve multi-coordinate, multi-degree-of-freedom measurement
In addition, the prior art has not found a single laser interferometer that can simultaneously measure multiple degrees of freedom

Method used

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Embodiment Construction

[0014] The laser feedback interferometer provided by the embodiment of the present invention will be described in detail below with reference to the accompanying drawings.

[0015] see figure 1 , the first embodiment of the present invention provides a laser feedback interferometer 100, including: a microchip laser 1, a beam splitter 2, a first frequency shifter 3, a second frequency shifter 4, a converging lens 5, At least two photodetectors 6 , an electrical signal processing system 7 , and a data acquisition and processing system 8 . The beam splitter 2 receives the laser light generated by the microchip laser 1 and divides it into two light outputs, wherein one light passes through the first frequency shifter 3, the second frequency shifter 4 and the converging lens in sequence 5. The other way is received by the at least two photodetectors 6, the at least two photodetectors 6, the electrical signal processing system 7 and the data acquisition and processing system 8 are ...

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Abstract

The invention relates to a laser feedback interferometer which comprises a microchip laser device, a spectroscope, a first frequency shifter, a second frequency shifter, a converging lens, at least two photoelectric detectors, an electric signal processing system and a data collecting and processing system, wherein the microchip laser device can output at least two parallel light beams in a single longitudinal and single transverse mode simultaneously, and the at least two parallel light beams can be used as measurement light for measuring information of a plurality of degrees of freedom of an objective to be measured.

Description

technical field [0001] The invention relates to a laser feedback interferometer. Background technique [0002] Laser interferometer is the main tool for precision displacement measurement and length measurement at present. It uses laser wavelength as the benchmark of displacement or length measurement, which can be directly traced to the international standard of length measurement. Through various phase subdivision technologies, laser interferometer can realize comparative High displacement measurement resolution. [0003] When an external mirror couples part of the laser's output light back into the resonator, the movement of the mirror will cause a modulation of the laser output power, similar to the traditional two-beam interference phenomenon, that is, a fringe movement corresponds to a half laser wavelength of the mirror. This is the laser feedback phenomenon, also known as the self-mixing interference phenomenon. A large number of researches on laser feedback interf...

Claims

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Application Information

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IPC IPC(8): G01B9/02G01J9/02
Inventor 张书练张松谈宜东
Owner TSINGHUA UNIV
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