Reflecting mirror surface shape control device

A surface control and reflective technology, applied in optical components, optics, instruments, etc., can solve the problems of high manufacturing cost and complex structure, and achieve the effects of low structural cost, high adjustment accuracy and high real-time efficiency.

Active Publication Date: 2013-09-11
TSINGHUA UNIV
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  • Abstract
  • Description
  • Claims
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Problems solved by technology

The structure of the existing deformable mirror relying on the spring restoring force is very co

Method used

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  • Reflecting mirror surface shape control device
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  • Reflecting mirror surface shape control device

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[0025] The embodiments of the present invention will be described in detail below. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals indicate the same or similar elements or elements with the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary, and are intended to explain the present invention, but should not be construed as limiting the present invention.

[0026] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", " "Back", "Left", "Right", "Vertical", "Horizontal", "Top", "Bottom", "Inner", "Outer", "Clockwise", "Counterclockwise" and other directions or positions indicated The relationship is based on the orientation or position relationship shown in the drawings, which is only for the convenience of describing the pres...

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Abstract

The invention discloses a reflecting mirror surface shape control device which comprises a mirror, a base, a heating/refrigerating unit and a temperature probe. The mirror is deformed when acting force is exerted on the mirror, and the surface shape of the deformed mirror has a shaping effect on the wavefront of light beam shone on a mirror surface. The base is connected with the mirror and used for receiving energy of the heating/refrigerating unit to generate deformation and acting the deformation on the mirror. The heating/refrigerating unit is installed at the bottom of the base and provides temperature conditions for the deformation of the base. The temperature probe is arranged in the base and used for detecting temperature change value generated in a process of delivering heat from the heating/refrigerating unit to the base so as to conduct control and adjustment. The reflecting mirror surface shape control device is simple in structure and high in adjusting precision and real-time efficiency, reduces energy consumption, meanwhile is low in structural cost and can achieve manufacturing of a small-size multi-adjusting-point efficient small deformable mirror.

Description

technical field [0001] The invention relates to the field of precision optical instruments, in particular to a reflective mirror surface shape control device. Background technique [0002] Deformable mirrors, also known as deformable mirrors, are mainly used in various adaptive optics systems. As a wavefront correction device to correct wavefront errors, they play an extremely important role in adaptive optics systems. One of the important components, the research and development of the deformable mirror is related to the correction ability and correction accuracy of the whole adaptive optics system. [0003] The deformable mirror compensates the wavefront phase distortion by changing its surface shape, which can be divided into two types: continuous surface shape and discrete surface. The advantage of continuous surface deformation mirror is that it can obtain continuous surface shape and high correction accuracy. The disadvantage is that the deformation of the surface sha...

Claims

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Application Information

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IPC IPC(8): G02B26/06
Inventor 黄磊巩马理闫平柳强薛峤冯泽心康少男闫海波
Owner TSINGHUA UNIV
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