An Efficient and Compact Mach-Zehnder Optical Switch Structure
A switch structure and optical switch technology, applied in the field of integrated optics, can solve the problems of long scale, large single chip size, unfavorable number of integrated discrete components, etc., and achieve the effect of easy expansion integration, reduced size, and convenient device layout and configuration
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[0018] The present invention will be further described in conjunction with the accompanying drawings and specific embodiments, but the protection scope of the present invention should not be limited thereby.
[0019] An efficient and compact Mach-Zehnder optical switch structure of the present invention can be fabricated on a substrate of silicon, silicon on insulator (Silicon on insulator, SOI), GeSi / Si, GaAs, GaAs / AlGaAs and InP / InGaAsP semiconductor substrate materials material. As an example of specific implementation, two input waveguides and two output waveguides of the present invention form a Mach-Zehnder 2×2 four-port thermo-optic switch device, which is prepared on SOI material. Using the thermo-optic effect characteristics of the optical waveguide material to change the refractive index of the Mach-Zehnder waveguide phase-shift arm induced by temperature, thereby changing the phase relationship between the reference arm and the phase-shift arm, and then controlling ...
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