Method using static electricity supporting type differential capacitance method to measure three-dimensional acceleration

Abstract

The invention discloses a method using a static electricity supporting type differential capacitance method to measure three-dimensional acceleration. The method uses liquid substances as a sensitive mass body, adopts a regular hexahedron structure, detects the deformation and location changes of liquid through the differential capacitance method, and measures the three-dimensional acceleration through using electrostatic force to balance inertia force. According to the method, liquid is used as the sensitive mass body, so that normal work can be restored after large impact or high overload; the static electricity supporting technology is adopted, and the electrostatic force and the inertia force are in linear relation, so that the method has the advantages of being high in sensitivity, wide in scaling range, and the like.

Description

technical field [0001] The invention belongs to the technical field of high-precision inertial measurement, and in particular relates to a method for measuring three-dimensional acceleration with an electrostatically supported differential capacitance method. Background technique [0002] The measurement of acceleration is to convert the physical signal of acceleration into a measurable electrical signal. For example, the measured acceleration can be converted into the capacitance change of the capacitor through three methods: variable area, variable dielectric constant, and variable gap. The traditional capacitive accelerometer-based measurement method adopts a differential variable gap structure, and the acceleration is measured by measuring the capacitance change between the two electrodes caused by the gap change between the sensitive electrode and the fixed electrode. Since the solid pole plate is used as the sensitive electrode, when the solid pole plate is fixed to ...

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to overcome the complex structure of the acceleration measurement method using solid matter as the sensitive mass body, the sensitivity is not high, it is not suitable for application under the condition of large impact or high overload, and the existing liquid acceleration measurement method cannot realize three-dimensional acceleration measurement. The measurement range is small, the relationship between liquid deformation and acceleration is nonlinear, etc., and a three-dimensional acceleration measurement method is provided that uses metal liquid as a sensitive mass body, electrostatically supports the metal liquid, and detects liquid deformation by differential capacitance method

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