Pressure sensor with overpressure protective device
The technology of an overpressure protection device and a pressure sensor is applied in the measurement device, elastic deformation meter type fluid pressure measurement, measurement of fluid pressure and other directions, which can solve the problems of difficulty in mass production, etc. Damage, make simple effects
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[0019] see Figure 1 ~ Figure 3 , the pressure sensor with an overvoltage protection device includes a base 6, a sensor cavity 2 is arranged in the base 6, a pressure sensitive diaphragm 4 is arranged in the sensor cavity 2, and the sensor cavity 2 is filled with There is silicone oil 5; the base 6 is provided with an isolation diaphragm 1 that transmits pressure to the silicone oil 5 in the sensor cavity 2 by generating displacement; the base 6 is also provided with an overpressure protection device 3 The overpressure protection device 3 includes a pressure-holding chamber 301 communicated with the sensor cavity 2, and the pressure-holding chamber 301 communicates with the sensor cavity 2 through a transition cavity 305; A piston 302 is arranged in the pressure chamber 301, and a piston rod 304 on the piston 302 is located in the transition chamber 305; the cross-sectional area of the piston rod 304 is smaller than that of the piston 302; A high-pressure gas is provided in...
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