ion implantation method
An ion implantation and ion technology, applied in electrical components, semiconductor/solid-state device manufacturing, circuits, etc., can solve the problems of non-standard wafer electrical parameters and wafer resistance value deviation.
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[0013] Such as figure 1 Shown is a schematic diagram of impacting a wafer with an ion beam. The ion beam 100 hits the wafer 200 to perform ion implantation on the wafer 200, and at the same time, the wafer 200 is driven by mechanical moving parts (not shown) to move back and forth in the vertical direction, so that the wafer 200 can be fully scanned, and after repeated times , the dose of ion implantation meets the requirements for making the resistance value of the wafer 200 reach the desired value.
[0014] On the side opposite to the emission of the ion beam 100, an ion beam current measuring device 300 is provided for providing data for monitoring the ion beam current. During the movement of the wafer 200 up and down, the shielded portion of the ion beam changes from less to more, and then to less, and so on. It is reflected on the ion beam current measuring device 300 that the detected current changes from large to small, then to large, and changes periodically.
[001...
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