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Energy-saving low-radiation glass vertical-type magnetron sputtering production device

A low-emissivity glass and magnetron sputtering technology, applied in the field of energy-saving low-emissivity glass production equipment, can solve the problems of insufficient quality of low-emissivity glass, and achieve the effect of firm and reliable adhesion and uniform film

Inactive Publication Date: 2013-11-13
YOUDU FUNCTIONAL FILM MATERIAL YANGZHOU
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The problem to be solved by the present invention: In order to solve the problem of insufficient quality of low-e glass in the prior art

Method used

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  • Energy-saving low-radiation glass vertical-type magnetron sputtering production device
  • Energy-saving low-radiation glass vertical-type magnetron sputtering production device
  • Energy-saving low-radiation glass vertical-type magnetron sputtering production device

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Embodiment Construction

[0016] The present invention will be described in further detail below with reference to the accompanying drawings.

[0017] like figure 1 As shown, an energy-saving low-emissivity glass vertical magnetron sputtering production equipment includes a coating cavity unit 1 . A process isolation cavity 2 is arranged between the plurality of coating cavity units 1 . An isolation valve is arranged between the coating cavity unit 1 and the process isolation cavity 2 . The process isolation chamber 2 is used for isolation between the coating chamber units 1, and there are no special requirements on the structure.

[0018] Coating cavity unit 1, such as figure 2 , image 3 As shown, it includes: a base 11 , a target frame 12 , a back plate base 13 , and a glass frame 14 . The target frame 12 and the back plate seat 13 are mounted on the base 11 to enclose a coating cavity 15 . The coating chamber 15 and the isolation valve 2 are sealed by the sealing flange 21 . The target hold...

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Abstract

The invention discloses an energy-saving low-radiation glass vertical-type magnetron sputtering production device. The energy-saving low-radiation glass vertical-type magnetron sputtering production device comprises multiple film-coating cavity units connected in series. A process isolation cavity is arranged between each adjacent two of the multiple film-coating cavity units. An isolation valve is arranged between each one of the multiple film-coating cavity units and the process isolation cavity adjacent with the film-coated cavity unit. Each one of the multiple film-coating cavity units comprises a base, a target material frame, a backboard seat and a glass frame. The target material frame and the backboard seat are installed on the base and form a film-coating cavity. The target material frame is provided with a target material cathode. An opening / closing device is arranged between the target material frame and the base. The glass frame is arranged in the film-coating cavity, has a vertical structure and forms an angle of 0-10 degrees with a vertical plane. The opening / closing device is driven by hydraulic pressure or air pressure. The glass frame is provided with a glass conveyer. According to the energy-saving low-radiation glass vertical-type magnetron sputtering production device, in energy-saving low-radiation glass production, glass is arranged vertically so that impurities deposited on the surface of the glass are reduced, the damage produced by impurities on a film is reduced, film adhesion is improved, and arc discharge caused by deposition of impurities on the target material cathode is reduced.

Description

technical field [0001] The invention relates to energy-saving and low-emissivity glass production equipment. Background technique [0002] Energy-saving and low-emissivity coated glass is a newly developed lighting material. It uses high-tech methods to uniformly coat the surface of high-quality float glass with a special film system, which greatly reduces the transmittance of radiant heat or ultraviolet rays on the glass surface. And improve the spectral selectivity of the glass. After the glass is coated with energy-saving and low-emissivity film, visible light can effectively pass through the film and glass, but the harmful ultraviolet rays will be effectively suppressed. The invisible infrared rays are 80% The above is reflected by the film system. Through the solar energy spectrum of the energy-saving and low-emission coated glass, the "cold light" enters the room after being filtered by the film system. Especially when the energy-saving low-emissivity coated glass is...

Claims

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Application Information

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IPC IPC(8): C23C14/35C03C17/00
Inventor 刘战合
Owner YOUDU FUNCTIONAL FILM MATERIAL YANGZHOU
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