The invention discloses an energy-saving low-
radiation glass vertical-type magnetron
sputtering production device. The energy-saving low-
radiation glass vertical-type magnetron
sputtering production device comprises multiple film-
coating cavity units connected in series. A
process isolation cavity is arranged between each adjacent two of the multiple film-
coating cavity units. An
isolation valve is arranged between each one of the multiple film-
coating cavity units and the
process isolation cavity adjacent with the film-coated cavity unit. Each one of the multiple film-coating cavity units comprises a base, a target material frame, a backboard seat and a glass frame. The target material frame and the backboard seat are installed on the base and form a film-coating cavity. The target material frame is provided with a target material
cathode. An opening / closing device is arranged between the target material frame and the base. The glass frame is arranged in the film-coating cavity, has a vertical structure and forms an angle of 0-10 degrees with a
vertical plane. The opening / closing device is driven by
hydraulic pressure or air pressure. The glass frame is provided with a glass conveyer. According to the energy-saving low-
radiation glass vertical-type magnetron
sputtering production device, in energy-saving low-radiation
glass production, glass is arranged vertically so that impurities deposited on the surface of the glass are reduced, the damage produced by impurities on a film is reduced, film adhesion is improved, and arc
discharge caused by deposition of impurities on the target material
cathode is reduced.