Memory manager and management method of vxworks-based dual-workpiece control system for lithography machine
A control system and dual-workpiece technology, applied in the direction of memory address/allocation/relocation, etc., can solve problems affecting system operation, etc., and achieve the effect of efficient management and reduced internal and external fragments
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specific Embodiment approach 1
[0045] Specific implementation mode one: the following combination figure 1 and figure 2 Illustrate this embodiment, the memory manager of the VxWorks-based lithography machine double workpiece platform control system described in this embodiment, it includes:
[0046] An initialization device for initializing the memory of the dual workpiece table control system of the lithography machine;
[0047] A memory allocation device for allocating the memory of the dual-workpiece control system of the lithography machine;
[0048] A memory release device used for managing the memory of a control system of a photolithography machine with a double worktable.
[0049] The implementation process of this embodiment is the same as that of the fifth embodiment, and the two workpiece stages refer to the workpiece stage and the mask stage of the lithography machine.
specific Embodiment approach 2
[0050] Specific implementation mode two: this implementation mode further explains implementation mode one, and the initialization device described in this implementation mode includes:
[0051]A device for storing the motion trajectory of the double worktable of the lithography machine and all parameters of the control system;
[0052] A system function device for dividing the memory of the double-workpiece control system of a lithography machine into three memory areas. The three memory areas are a system kernel memory area, an adjustable memory area, and a heap memory area. The three memory areas They are respectively divided into memory block queues of different sizes; the system kernel memory area includes: a device for prohibiting users from accessing the system kernel memory area and protecting the system kernel memory area;
[0053] A device for establishing corresponding tasks according to the application of the control system, automatically adjusting the memory of th...
specific Embodiment approach 3
[0115] Specific implementation mode three: the following combination figure 1 For illustration, this implementation mode further describes the second implementation mode, and the memory allocation device described in this implementation mode includes:
[0116] Use the interface function memMalloc(UNIT32size) to find a memory queue larger than size, and check whether there are remaining memory blocks in the memory queue. If there are remaining memory blocks, continue to check whether the remaining memory size can be split. The split memory block is inserted into the corresponding queue. When it cannot be split, the entire remaining memory block is allocated; Interface function device for updating variables at the head of the memory queue.
[0117] The implementation process of this embodiment is the same as that of Embodiment 7, which needs to be repeated. Among them, the infrequently used memory queue is a queue with a small statistical value, and the search can be realized b...
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