Optical characteristics measuring apparatus, and optical characteristics measuring method
A technology for optical properties and measuring devices, applied in color/spectral properties measurement, measuring device, optical radiation measurement, etc., can solve the problem of inability to measure Fourier spectral properties and birefringence at the same time
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Embodiment 1
[0048] figure 1 and figure 2 An optical characteristic measurement device according to Example 1 is shown. As shown in these figures, the optical characteristic measurement device 1 related to Example 1 includes a light source 3, a polarizer 5, an objective lens 7, a first polarizer 9 and a second polarizer 11, a phase shifter 13, an analyzer 15, Imaging lens 17 and detector 19. In this embodiment, the objective lens 7 , the first polarizer 9 and the second polarizer 11 constitute a splitting optical system, and the imaging lens 17 constitutes an imaging optical system. In addition, the phase shifter 13 functions as phase difference imparting means.
[0049] The above-mentioned objective lens 7 is configured to be movable in the optical axis direction by a lens driving mechanism 21 . The lens drive mechanism 21 is used to scan the focus position of the objective lens 7, and corresponds to focus position changing means. The above-mentioned lens driving mechanism 21 can b...
Embodiment 2
[0074] Figure 15 ~ Figure 18 An optical characteristic measurement device 1 according to Example 2 is shown. The configurations of the phase shifter and the imaging optical system of the optical characteristic measurement device 1 according to the second embodiment are greatly different from those of the first embodiment. In addition, in Figure 16 In the figure, the illustration of the analyzer 15 arranged before the imaging lens 35 constituting the imaging optical system is omitted for the sake of convenience.
[0075] In Example 2, the linearly polarized light component emitted from the light source 3 and transmitted through the polarizer 5 is irradiated onto the linear measurement area S1 of the sample S. As shown in FIG. The light irradiated to the measurement area S1 of the sample S and passed through the measurement area S1 enters the objective lens 7 and reaches the phase shifter 31 through the first polarizer 9 and the second polarizer 11 after being transformed in...
Embodiment 3
[0094] Figure 19 ~ Figure 21 Example 3 of the present invention is shown. Such as Figure 19 and Figure 20 As shown, in the spectral characteristic measurement device 1 of the present embodiment, the imaging lens 35 is divided into a reference lens portion 35a into which the reference beam reflected by the reference mirror portion 32 enters, and a tilt lens into which the oblique beam reflected from the tilt mirror portion 33 enters. Section 35b. The reference lens portion 35a and the inclined lens portion 35b have a shape obtained by dividing the imaging lens 35 of Embodiment 2 into two, and are provided so as to maintain the inclination of the optical axis of the other of the reference beam and the inclined beam with respect to one of the optical axes. In the state, the other optical axis is deviated along the linear interference image formed on the light receiving surface 19 a (imaging surface) of the detector 19 . That is, these reference lens part 35a and tilt lens ...
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