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Optical characteristics measuring apparatus, and optical characteristics measuring method

A technology for optical properties and measuring devices, applied in color/spectral properties measurement, measuring device, optical radiation measurement, etc., can solve the problem of inability to measure Fourier spectral properties and birefringence at the same time

Inactive Publication Date: 2015-05-13
KAGAWA UNIVERSITY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, in conventional devices, it was not possible to measure both Fourier spectral properties and birefringence at the same time

Method used

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  • Optical characteristics measuring apparatus, and optical characteristics measuring method
  • Optical characteristics measuring apparatus, and optical characteristics measuring method
  • Optical characteristics measuring apparatus, and optical characteristics measuring method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0048] figure 1 and figure 2 An optical characteristic measurement device according to Example 1 is shown. As shown in these figures, the optical characteristic measurement device 1 related to Example 1 includes a light source 3, a polarizer 5, an objective lens 7, a first polarizer 9 and a second polarizer 11, a phase shifter 13, an analyzer 15, Imaging lens 17 and detector 19. In this embodiment, the objective lens 7 , the first polarizer 9 and the second polarizer 11 constitute a splitting optical system, and the imaging lens 17 constitutes an imaging optical system. In addition, the phase shifter 13 functions as phase difference imparting means.

[0049] The above-mentioned objective lens 7 is configured to be movable in the optical axis direction by a lens driving mechanism 21 . The lens drive mechanism 21 is used to scan the focus position of the objective lens 7, and corresponds to focus position changing means. The above-mentioned lens driving mechanism 21 can b...

Embodiment 2

[0074] Figure 15 ~ Figure 18 An optical characteristic measurement device 1 according to Example 2 is shown. The configurations of the phase shifter and the imaging optical system of the optical characteristic measurement device 1 according to the second embodiment are greatly different from those of the first embodiment. In addition, in Figure 16 In the figure, the illustration of the analyzer 15 arranged before the imaging lens 35 constituting the imaging optical system is omitted for the sake of convenience.

[0075] In Example 2, the linearly polarized light component emitted from the light source 3 and transmitted through the polarizer 5 is irradiated onto the linear measurement area S1 of the sample S. As shown in FIG. The light irradiated to the measurement area S1 of the sample S and passed through the measurement area S1 enters the objective lens 7 and reaches the phase shifter 31 through the first polarizer 9 and the second polarizer 11 after being transformed in...

Embodiment 3

[0094] Figure 19 ~ Figure 21 Example 3 of the present invention is shown. Such as Figure 19 and Figure 20 As shown, in the spectral characteristic measurement device 1 of the present embodiment, the imaging lens 35 is divided into a reference lens portion 35a into which the reference beam reflected by the reference mirror portion 32 enters, and a tilt lens into which the oblique beam reflected from the tilt mirror portion 33 enters. Section 35b. The reference lens portion 35a and the inclined lens portion 35b have a shape obtained by dividing the imaging lens 35 of Embodiment 2 into two, and are provided so as to maintain the inclination of the optical axis of the other of the reference beam and the inclined beam with respect to one of the optical axes. In the state, the other optical axis is deviated along the linear interference image formed on the light receiving surface 19 a (imaging surface) of the detector 19 . That is, these reference lens part 35a and tilt lens ...

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Abstract

A linearly polarized light reaches a sample S through a polarizer. A retardation is given to the linearly polarized light by the sample S. Then, the light reaches a movable mirror unit 131 and a fixed mirror unit 132 of a phase shifter 13 through a first polarizing plate 9 and a second polarizing plate 11. Then, the measurement lights that have been reflected on these mirror units pass through an analyzer 15, and are caused by an imaging lens 17 to form an interference image on the light-receiving surface of a detector 19. At this time, an optical path length difference between a beam reflected on the movable mirror unit 131 and a beam reflected on the fixed mirror unit 132 is continuously changed by moving the movable mirror unit 131. Hence, the imaging intensity of the interference image detected by the detector 19 continuously changes, so that a synthetic waveform similar to an interferogram can be acquired. The synthetic waveform is Fourier-transformed, whereby an amplitude per wavelength and a birefringent phase difference per wavelength can be obtained.

Description

technical field [0001] The present invention relates to an optical characteristic measuring device and method capable of measuring both the spectral characteristic and the polarization characteristic of a substance. Background technique [0002] Conventionally, there is known a method of estimating unknown components in a substance by measuring the optical properties of the substance. For example, Patent Document 1 discloses a method of obtaining a birefringence phase difference (retardation) from the intensity of transmitted light when light is transmitted through a substance to be measured, and calculating the intrinsic birefringence of the substance from the birefringence phase difference. , so that unknown components can be estimated. Birefringence refers to the phenomenon that two refracted lights appear when light is incident on an anisotropic medium. Since the birefringent phase difference is represented by the product of the birefringence index and the transmitted ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N21/23G01J4/04G01N21/27
CPCG01J3/0224G01J3/453G01J3/4535G01N21/23G01N21/45
Inventor 石丸伊知郎
Owner KAGAWA UNIVERSITY