Ultrasonic-modulation electrostatic-induction-drive fine electric spark machining device

Abstract

The invention provides an ultrasonic-modulation electrostatic-induction-drive fine electric spark machining device, which comprises a main control unit, a machine tool body and a power supply. A workbench and a Z-axis lifting feeding mechanism are arranged on the machine tool body. A metal sheet is arranged on the Z-axis lifting feeding mechanism. An ultrasonic vibration and detection device is arranged on the workbench. A workpiece fixture is arranged on the ultrasonic vibration and detection device. The metal sheet, the workpiece fixture and the power supply are serially connected. The ultrasonic vibration and detection device and the power supply are respectively connected with the main control unit. The ultrasonic-modulation electrostatic-induction-drive fine electric spark machining device provided by the invention has the beneficial effects that voltage is respectively applied to the metal sheet and the workpiece fixture through the power supply, the metal sheet and a workpiece on the workpiece fixture are enabled to have attraction force due to charges of different polarities, the metal sheet is bent and deformed under the effect of the attraction force, the metal sheet is enabled to move towards the workpiece on the workpiece fixture to realize fine feeding, the chip removal can be improved through the ultrasonic vibration and detection device and the realization of high-precision fine electric spark machining is facilitated.

Description

technical field [0001] The invention relates to an electric discharge processing device, in particular to a micro electric discharge processing device driven by ultrasonic modulation electrostatic induction. Background technique [0002] With the development of science and technology, the processing precision of the workpiece is required to be higher and higher, and the size of the workpiece is getting smaller and smaller. For this reason, scholars at home and abroad have invented many kinds of micro-processing technologies, such as photolithography technology, LIGA technology, laser technology and micro electric discharge machining technology. Due to the unique advantages of micro-EDM in machining tiny parts, it has been more and more widely used. The precision of micro-EDM is closely related to the precision of the servo feed device. Therefore, the precision servo feed device with small displacement is an indispensable part of the micro-EDM system. [0003] Micro-EDM is ...

AI Technical Summary

Problems solved by technology

With the advancement of technology, the accuracy of these two driving mechanisms is also improving. However, the current error of the ball screw itself is mostly more than a few microns, coupled with the rotation error of the servo motor, the accuracy will be further reduced

Moreover, micro-EDM belongs to low-speed machining, and the servo motor is prone to climbing at low speed, which seriously affects the feed accuracy of the servo mechanism.

A linear motor with a high-precision grating scale can achieve a feed accuracy of 1 micron, but it still cannot meet the servo feed requirements of micro-EDM

[0005] In recent years, piezoelectric ceramic motors have been used in precision servo feeding. Compared with the previous two servo devices, the feeding accuracy of piezoelectric ceramic motors has improved a lot and can reach nanometer level, but its high cost limits its Promote application

[0006] In addition, in traditional EDM, due to the small processing size and narrow discharge gap, it is difficult to discharge the waste generated by erosion, and it is easy to cause abnormal discharge such as short circuit and arcing. At the same time, in order to achieve higher processing accuracy and surface Quality, the method of reducing the single discharge energy is used to reduce the amount of material erosion and reduce the processing speed

When machining micro-holes, the tool electrode is fine. When machining micro-holes with a relatively large depth and diameter, the abnormal discharge will easily burn the tool electrode, resulting in unstable processing, which limits the application of micro-EDM.

In practice, researchers use methods such as artificial exhaust, forced flushing or pumping, and accelerated working fluid circulation to accelerate the discharge of erosion materials, but none of them have achieved good results.

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