Capacitive microcomputer electromagnetic field sensor

Abstract

The invention discloses a capacitive microcomputer electromagnetic field sensor. The capacitive microcomputer electromagnetic field sensor comprises a silicon substrate, a silicon dioxide layer, a polycrystalline silicon layer and a silicon nitride layer which are sequentially arranged from bottom to top in an overlaying mode. The middle part of the silicon dioxide layer is hollow, a U-shaped beam is arranged in the middle part of the polycrystalline silicon layer and the middle part of the silicon nitride layer, and an anchor area is arranged around the silicon nitride layer. The root portion of the U-shaped beam is fixedly connected with the anchor area, and the U-shaped beam is in a suspending state. A driving metal wire is arranged on the upper surface of the silicon nitride layer of the U-shaped beam. A capacitive upper electrode plate bonding pad, a capacitive bottom electrode bonding pad and driving metal wire bonding pads are arranged in the anchor area. A first through hole with a metal column and a second through hole with a metal column are formed in the silicon nitride layer. The polycrystalline silicon layer of the U-shaped beam is connected with the capacitive upper electrode plate bonding pad through the first through hole so that a capacitive upper electrode can be formed, and the polycrystalline silicon layer is connected with the capacitive bottom electrode bonding pad through the second through hole so that a capacitive bottom electrode can be formed. A groove is formed in the polycrystalline silicon layer, and the groove isolates the capacitive upper electrode from the capacitive bottom electrode. The capacitive microcomputer electromagnetic field sensor can measure the amplitude of magnetic fields, and is simple in structure.

Description

technical field [0001] The invention belongs to the technical field of sensors, and in particular relates to a capacitive microcomputer electromagnetic field sensor. Background technique [0002] Magnetic field sensors have a long history, from the invention of the compass to modern traffic navigation, magnetic field sensors have been paid more and more attention. [0003] Magnetic field sensors are closely related to our lives. There are magnetic fields or information related to magnetic fields in many places in nature and human society. The magnetic field generated by artificial permanent magnets can be used as a carrier of many kinds of information. Therefore, the task of detecting, collecting, storing, converting, reproducing and monitoring various magnetic fields and various information carried in magnetic fields naturally falls on the magnetic field sensor. Magnetic sensors using various physical, chemical and biological effects have been developed, and have been wi...

AI Technical Summary

Problems solved by technology

These magnetic field sensors can only measure the magnitude of the magnetic field

Images