Pressure detection module and pressure sensor device having such a pressure detection module

一种检测模块、压力的技术，应用在测量装置、测量流体压力、通过电磁元件测量流体压力等方向，能够解决接触元件严密密封高、制造费事、大结构体积等问题，达到节省成本、小耗费、小结构空间的效果

Active Publication Date: 2014-01-15
ROBERT BOSCH GMBH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The production of such a pressure sensor arrangement with a standard vacuum in the housing and the realization of a hermetically sealed contact element requires a relatively large structural volume of the pressure sensor arrangement, moreover, the production is complex and the hermetic sealing of the contact element is associated with high costs

Method used

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  • Pressure detection module and pressure sensor device having such a pressure detection module
  • Pressure detection module and pressure sensor device having such a pressure detection module
  • Pressure detection module and pressure sensor device having such a pressure detection module

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Embodiment Construction

[0030] Figure 1a A cross-section of a perspective view of an embodiment of a pressure detection module (100) according to the present invention is shown in . Such a pressure detection module ( 100 ) is suitable, for example, for pressure detection in low-pressure regions with pressures in the range of, for example, about 1 bar to about 7 bar, such as in the intake tract or exhaust line of a motor vehicle engine. Furthermore, such a pressure detection module is also suitable for detecting pressures in the medium pressure range, ie from about 10 bar to about 100 bar, for example in transmission control applications. Figure 1a The embodiment shown in is particularly suitable for detecting the pressure of fluids, ie gases or liquids, especially fluids with aggressive chemical or mechanical properties. Such fluids are, for example, transmission oils, brake fluids or exhaust gases having strongly acidic or basic groups, without being limited to such fluids. Furthermore, applicatio...

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Abstract

The invention relates to a pressure detection module. The pressure detection module includes a receptacle part for receiving a carrier substrate. A first side of the carrier substrate is provided with a pressure detection unit; and the carrier substrate is inserted into the receptacle part by virtue of a second side facing away from the first side; and the carrier substrate is fixed on the bottom of a receptacle groove by virtue of the second side facing away from the first side. In order to construct the pressure detection module as small as possible, and to manufacture it in a cost-effective way, the receptacle part, the receptacle groove and a peripheral flange around the receptacle groove are, for example, provided with a plate-shaped design. The bottom has a contacting opening, through which contact surfaces of the carrier substrate, which are exposed at the contacting opening, are electrically contactable. Besides, the invention also relates to a pressure sensor device having such a pressure detection module.

Description

technical field [0001] The invention relates to a pressure detection module having the features stated in the preamble of the independent device claim and to a pressure sensor arrangement having a pressure detection module. Background technique [0002] DE 102 28 000 A1 discloses a pressure sensor arrangement having a pressure detection module having the features of the preambles of the independent claims. The pressure sensor arrangement shown there is arranged in a housing and uses a pressure sensor, in particular a semiconductor pressure sensor, for detecting the pressure. The semiconductor pressure sensor has a sensor membrane which is provided with a sensor element on the upper side, wherein the central part is covered by the sensor membrane on the upper side. The pressure supply to the sensor membrane takes place here via grooves introduced into the rear side of the semiconductor pressure sensor, produced for example by reactive ion etching. Here, the semiconductor pr...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L19/00G01L9/00
CPCG01L9/0052G01L9/0073G01L19/0076G01L19/0645G01L19/148G01L9/0042G01L9/0045
Inventor M·哈比比M·赖因哈德
Owner ROBERT BOSCH GMBH
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