Planar three-degree-of-freedom parallel micro-positioning platform of symmetric structure

Abstract

The invention provides a planar three-degree-of-freedom parallel micro-positioning platform of a symmetric structure. The planar three-degree-of-freedom parallel micro-positioning platform comprises a movable worktable, a fixed platform body and three full-flexible supporting chains connected between the movable worktable and the fixed platform body. The planar three-degree-of-freedom parallel micro-positioning platform is characterized in that the three full-flexible supporting chains are symmetric with the geometrical axis of the movable worktable as the center, each full-flexible supporting chain comprises an elastic moving pair and an elastic folded beam shaped like a Chinese character 'gong', the side face, shaped like the Chinese character 'gong', of each elastic folded beam and the top face of the movable worktable are in the same plane, one end of each elastic folded beam shaped like the Chinese character 'gong' is connected with the movable worktable, the other end of each elastic folded beam shaped like the Chinese character 'gong' is connected with one side face of the corresponding elastic moving pair, the opposite side faces of each elastic moving pair are fixedly connected with the fixed platform body through a piezoelectric ceramic actuator, and the geometrical axes of the three piezoelectric ceramic actuators are in the same plane and do not intersect at one point. The planar three-degree-of-freedom parallel micro-positioning platform of the symmetric structure is made of a piece of a material, and the shortest kinematic chain is adopted, so that the platform has the advantages of being free of assembly errors, compact in structure, high in kinematic accuracy, large in bearing capacity and the like.

Description

technical field [0001] The invention belongs to the field of manufacturing technology, in particular to a structurally symmetrical plane three-degree-of-freedom parallel micro-motion platform. Background technique [0002] With the development of micro / nano technology, micro-motion mechanisms, as an important part of micro-operating systems, have broad application prospects in the fields of minimally invasive surgery, precision mechanical engineering, optical fiber docking, and bioengineering, while parallel micro-motion mechanisms are relatively Compared with the series mechanism, it has the advantages of no friction, no gap, no error accumulation, fast response, and large bearing capacity, so it is widely used. [0003] Companies such as Queensgate in the UK and PI in Germany have produced products based on nano-scale micro-operation mechanisms driven by piezoelectric ceramics, which are mainly used in micro-machining, micro-assembly, optical fiber detection and other occa...

AI Technical Summary

Problems solved by technology

[0004] Although many scholars at home and abroad have studied the three-degree-of-freedom parallel micro-motion mechanism, most of these research results and patented technologies are limited to meeting the requirements of certain motion accuracy and motion space, and often do not take the rotation angle of the end of the motion table

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