Buffer sheet used in vacuum chuck that adsorbs object to be processed

A technology of vacuum suction cups and buffer sheets, applied in the field of buffer sheets, can solve the problems of expensive ventilation performance of polyethylene film, insufficient anti-static properties, etc., and achieve excellent anti-static effect and cost reduction effect.

Active Publication Date: 2014-02-26
TOP NANOSYS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, conventional buffer sheets have approximately 10 10 ohm / sq resistance, which is not enough antistatic
In addition, polyethylene film is expensive and has low ventilation performance

Method used

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  • Buffer sheet used in vacuum chuck that adsorbs object to be processed
  • Buffer sheet used in vacuum chuck that adsorbs object to be processed
  • Buffer sheet used in vacuum chuck that adsorbs object to be processed

Examples

Experimental program
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Embodiment Construction

[0026] Various example embodiments will be described more fully hereinafter with reference to the accompanying drawings, in which some example embodiments are shown.

[0027] figure 1 is a cross-sectional view of a buffer sheet 100 of a vacuum chuck for supporting a workpiece according to an exemplary embodiment of the present inventive concept. as in figure 2 As shown in , the buffer sheet 100 includes a non-woven sheet 110 and an ESD coating 130 .

[0028] The buffer sheet 100 is bonded to the upper surface of the vacuum chuck 3 that fixes the work by supporting. The workpiece is set on the buffer sheet 100 . Vacuum chucks exhibit support and fixation in precise cutting operations or precise coating operations for glass substrates or semiconductor wafers used in liquid crystal displays, and in bonding operations for polarizing plates and retardation plates, or those plates with glass substrates Artifact functionality.

[0029] The nonwoven fabric sheet 110 is a mat-sha...

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PUM

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Abstract

Disclosed is a buffer sheet used in a vacuum chuck that adsorbs an object to be processed. The buffer sheet of the present invention is coupled to the upper side of the vacuum chuck which adsorbs and fixes the object to be processed, and includes a non-woven sheet and an ESD coating layer comprising carbon nanotube on the non-woven sheet so that the object to be processed is mounted. According to the present invention, an antistatic effect is excellent since the ESD coating layer comprising the carbon nanotube with electrical conductivity is applied.

Description

technical field [0001] Embodiments relate to a cushion sheet, and more particularly, to a cushion sheet for a vacuum chuck used to support a workpiece in a flat display panel, a semiconductor wafer, or the like. Background technique [0002] In general, the position of the glass substrate can be fixed without movement in a precise cutting operation or a precise painting operation of the glass substrate used for display devices (widely used in notebook computers, desktop computers, and televisions). In addition, it is possible to fix the position of the semiconductor wafer without moving it during a precise cutting operation or a precise coating operation on the semiconductor wafer. [0003] Vacuum supported methods are generally used to hold workpieces such as glass substrates or semiconductor wafers. The method is to use the vacuum chuck 3 as will be in figure 1 Fix the workpiece by means of vacuum support as shown in 4. Here, a ventilation hole 1 is formed on the surfac...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/687H01L21/683C08J5/18B23Q3/08G02F1/13
CPCH01L21/6838B23Q3/088G02F1/1303C08J5/18G02F1/13H01L21/687
Inventor 李在德崔日焕金承烈
Owner TOP NANOSYS
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