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Method and device for detecting roughness of inner surface of micro-pore

A detection method and detection device technology, which is applied in the direction of measuring devices, optical devices, instruments, etc., can solve the problem that the sensor cannot penetrate into the microhole, etc., and achieve the effects of shortening the detection time, improving the measurement accuracy, and improving the signal-to-noise ratio

Inactive Publication Date: 2014-03-05
NANJING UNIV OF AERONAUTICS & ASTRONAUTICS
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Problems solved by technology

[0004] The invention provides a method and device for detecting the roughness of the inner surface of a microhole, which effectively overcomes the problem that the sensor cannot penetrate into the microhole in the prior art, the sensor angle can be changed flexibly and conveniently, and the measurement accuracy is high and the efficiency is high

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  • Method and device for detecting roughness of inner surface of micro-pore
  • Method and device for detecting roughness of inner surface of micro-pore
  • Method and device for detecting roughness of inner surface of micro-pore

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Embodiment Construction

[0027] The present invention will be further described below in conjunction with accompanying drawing.

[0028] The device provided by the present invention to realize the detection method of the micropore inner surface roughness is as figure 1 As shown, it includes a three-dimensional workbench, a laser emitter 9, a photodetector 14 and a RIM_FOS sensor 15, and the base 1 of the three-dimensional workbench is provided with a Y-axis precision moving stage 2, an X-axis precision moving stage 3, and a sample stage 4 in sequence. A Y-axis precision guide hole 17 is opened between the axis precision moving table 3 and the base 1 . The top of the base 1 is equipped with a cross bar 7 through the bracket 5, and the middle of the cross bar 7 passes through the Z-axis precision guide box 11, the Z-axis precision moving table 12, the Z-axis rotating vertical bar 13 and the sensor fixture 6 to clamp the RIM_FOS sensor 15, the laser The emitter 9 and the photodetector 14 are connected t...

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Abstract

The invention provides a method and device for detecting the roughness of the inner surface of a micro-pore. The method comprises the steps that diffuse scattering luminous fluxes of different positions modulated through the rough surface intensity are collected so that the roughness can be evaluated; a non-linear relationship exists between the ratio of voltages generated by two sets of luminous fluxes and the roughness, a micro-pore with the known roughness is calibrated, the micro-pore to be detected is compared with a calibration value, and then the roughness of the micro-pore to be detected is detected. By the adoption of the method and device for detecting the roughness of the inner surface of the micro-pore, the problem that a sensor cannot extend into the micro-pore in the prior art is solved, the angle of the sensor can be changed flexibly and conveniently, the measurement accuracy is high, and efficiency is high.

Description

technical field [0001] The invention relates to the field of optoelectronic technology measurement, in particular to a method and a device for detecting the roughness of the inner surface of a micropore. Background technique [0002] With the advancement and development of modern science and technology, various ultra-precision processing technologies have emerged, and high-quality surface processing has been realized, thus putting forward higher and higher requirements for surface roughness. Moreover, in some high-tech fields, more and more products are showing a trend of miniaturization, among which microporous devices are more and more widely used in machinery, instrumentation, aviation, electronics, biomedical and textile industries. The ensuing question is how to test the surface roughness of the inner wall of the micropore. At present, the commonly used methods for measuring the roughness of the inner wall of the micropore can be divided into comparative measurement acc...

Claims

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Application Information

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IPC IPC(8): G01B11/30
Inventor 陈果叶明倪志强
Owner NANJING UNIV OF AERONAUTICS & ASTRONAUTICS
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