Water cooled electrode of sapphire single crystal furnace
A sapphire single crystal furnace and water-cooled electrode technology, applied in the direction of single crystal growth, single crystal growth, crystal growth, etc., can solve the problems of large size, poor sealing performance, and complex structure of water-cooled electrodes, and achieve enhanced conductivity and durability Heat resistance, simple structure, and the effect of improving thermal insulation performance
Active Publication Date: 2014-03-26
NANJING CRYSTAL GROWTH & ENERGY EQUIP CO LTD
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[0005] The purpose of the present invention is to provide a new type of reliable sapphire single crystal furnace for the existing sapphire crystal growth furnace with large size, complex structure, influence on the uniformity of the thermal field in the furnace, and poor sealing performance. Water-cooled electrode
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[0016] The accompanying drawings non-restrictively disclose the structure of a specific embodiment involved in the present invention, and the present invention will be further described below in conjunction with the accompanying drawings.
[0017] Depend on figure 1 and figure 2 It can be seen that the present invention includes an electrode body 2, one end of the electrode body 2 is provided with a water-cooled counterbore 12, and the opening of the water-cooled counterbore 12 is provided with an internal thread, and the circulating water joint 4 includes a body, an inner water pipe 3 and an outer water channel 13 and Two water pipe interfaces 14 communicating with the inner water pipe 3 and the outer water channel 13 respectively, wherein the outer water channel 13 is located between the outer wall of the inner water pipe 3 and the inner wall of the body, the inner water pipe 3 is inserted into the water cooling sink hole 12 of the electrode body 2, and the body and the wat...
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The invention relates to a water cooled electrode of a sapphire single crystal furnace. The water cooled electrode comprises an electrode body; one end of the electrode body is provided with a water-cooled countersink, and a circulating water joint; the circulating water joint comprises a main body, an inner water pipe, an outer water pipe, and two water pipe joints which are respectively communicated with the inner water pipe and the outer water pipe; the main body and the water-cooled countersink of the electrode body are hermetically connected via matched screw threads; the other end of the electrode body is provided with a V-shaped locking groove; the V-shaped locking groove is provided with an electrode locking block; the electrode locking block, which is driven by a bolt and a nut, is capable of sliding from a groove opening to a groove bottom of the V-shaped locking groove; the electrode body is connected to the sapphire single crystal furnace via four fixing bolts, and a junction surface of the electrode body with the sapphire single crystal furnace is provided with a insulating spacer and an O-shaped sealing ring; outer edge of an end face of the insulating spacer is taken as a supporting point of the O-shaped sealing ring; insulating spacers are also arranged between the fixing bolts and the electrode body; a junction part of an end face of the electrode body and the circulating water joint is provided with a sealing ring; and an electrode claw of a heater is tightly locked using the electrode locking block.
Description
technical field [0001] The invention relates to a water-cooled electrode for industrial furnaces, in particular to a water-cooled electrode for sapphire single crystal furnaces. Background technique [0002] With the rapid development of the global new energy market, the LED industry has gradually become a new growth point of the energy industry, and has the ability to catch up with other energy-saving industries, showing a trend of rapid development worldwide. [0003] Sapphire single crystal furnace is an important crystal growth equipment in the LED industry chain. Since the sapphire single crystal must be grown slowly at high temperature (about 2050°C) and high vacuum (10E-5Pa), the water-cooled electrode connected to the heater has extremely high vacuum tightness, electrical conductivity and heat resistance. important. At present, most of the water-cooled electrodes used in sapphire furnaces have complex structures and large sizes, which will destroy the uniformity of...
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IPC IPC(8): C30B29/20
Inventor 李辉姜宏伟张洪涛张小潞吴春生
Owner NANJING CRYSTAL GROWTH & ENERGY EQUIP CO LTD