Annular radial line aluminum metal polarization transmission grating
A technology of transmission gratings and aluminum metals, applied in diffraction gratings, polarizing elements, optics, etc., can solve problems such as difficult to achieve linear measurement of optical rotation angle, difficult to achieve accurate measurement of optical rotation angle, etc.
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[0007] The specific embodiment of the present invention is as figure 2 As shown, [1] is a glass substrate, 16 × 16 mm square, [2] is an aluminum metal line, the line width L1 = L2 = 50 nanometers, that is, equal line width, [3] is a groove, the depth h = 100 nanometers, ring grating inner radius R1=2 millimeters, outer radius R2=4 millimeters, inner diameter period d1=100 nanometers, that is, inner diameter groove width W1=50 nanometers, outer diameter period d2=200 nanometers, that is, outer diameter groove width W2= 150 nm. The method of realization is to use physical sputtering technology to vapor-deposit aluminum metal film on [1], coat photoresist on the film, use electron beam to expose the circular radial line transmission grating pattern on the photoresist, and then develop and Manufactured after reactive ion beam etching. The grating has a remarkable polarization beam splitting effect on linearly polarized light with a wavelength of more than 600 nanometers, and th...
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