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Annular radial line aluminum metal polarization transmission grating

A technology of transmission gratings and aluminum metals, applied in diffraction gratings, polarizing elements, optics, etc., can solve problems such as difficult to achieve linear measurement of optical rotation angle, difficult to achieve accurate measurement of optical rotation angle, etc.

Inactive Publication Date: 2014-03-26
徐启峰
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Problems solved by technology

When this type of polarizer is used to analyze the polarization of linearly polarized light, as the polarization plane of the linearly polarized light rotates, the intensity of the transmitted light changes nonlinearly according to Marius' law, so it is difficult to achieve linear measurement of the angle of rotation; application It is difficult to accurately measure the angle of rotation by manually or mechanically rotating the unidirectional polarizer; in addition, the method of using a unidirectional polarizer to analyze polarization has optical power dependence, and factors such as temperature drift and optical loss affect the accuracy of the measurement

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  • Annular radial line aluminum metal polarization transmission grating
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Embodiment Construction

[0007] The specific embodiment of the present invention is as figure 2 As shown, [1] is a glass substrate, 16 × 16 mm square, [2] is an aluminum metal line, the line width L1 = L2 = 50 nanometers, that is, equal line width, [3] is a groove, the depth h = 100 nanometers, ring grating inner radius R1=2 millimeters, outer radius R2=4 millimeters, inner diameter period d1=100 nanometers, that is, inner diameter groove width W1=50 nanometers, outer diameter period d2=200 nanometers, that is, outer diameter groove width W2= 150 nm. The method of realization is to use physical sputtering technology to vapor-deposit aluminum metal film on [1], coat photoresist on the film, use electron beam to expose the circular radial line transmission grating pattern on the photoresist, and then develop and Manufactured after reactive ion beam etching. The grating has a remarkable polarization beam splitting effect on linearly polarized light with a wavelength of more than 600 nanometers, and th...

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Abstract

The invention relates to an annular radial line aluminum metal polarization transmission grating which is manufactured by using the technologies of nano imprint lithography, reactive ion beam etching, physical sputtering and the like. The period of the grating is less than or equal to 200 nm. A significant polarization beam splitting effect is produced on a linearly polarized light whose wavelength is three times more than the period, namely the transmission of a TE wave whose electric field direction is parallel to a grid bar cannot be realized, while a TM wave whose electric field direction is perpendicular to the grid bar can be realized. The linearly polarized light which transmits the grating forms a light spot which has a fixed shape and synchronously rotates with a polarization plane. The power of the light after transmission does not change. The annular radial line aluminum metal polarization transmission grating can be used for the linear measurement of the optical rotation angle of the polarized light, and belongs to the technical field of applied optics.

Description

technical field [0001] The invention relates to an aluminum metal polarization transmission grating with annular radial lines, which is made by nano-imprinting, reactive ion beam etching, physical sputtering and other technologies. The grating period is less than 200 nanometers, and it has a significant polarization beam splitting effect on linearly polarized light that is more than 3 times the wavelength of the grating period, that is, the TE wave whose electric field direction is parallel to the grid bar cannot pass through, and the TM wave whose electric field direction is perpendicular to the grid bar can. Transmission, the linearly polarized light passing through the grating forms a light spot with a fixed shape and rotates synchronously with the polarization plane, the power of the transmitted light does not change, it can be used for linear measurement of the rotation angle of polarized light, and belongs to the field of applied optics technology. Background technique ...

Claims

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Application Information

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IPC IPC(8): G02B5/18G02B5/30G03F7/00
Inventor 徐启峰
Owner 徐启峰
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