Single arm structure for thermoelectric semiconductor temperature sensing sheet and preparation process
A technology of thermoelectric semiconductor and preparation process, which is applied in the field of temperature sensing chips, can solve problems such as thermal cracking and large thermal stress, and achieve the effect of prolonging service life and solving thermal cracking problems
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[0021] now attached Figure 1~5 , taking the specific preparation process of the single-arm structure of the thermoelectric semiconductor temperature sensing chip as an example to further describe the present invention.
[0022] Step 1: The thermoelectric semiconductor p-type material of the temperature sensing sheet is used (Cu 4 Te 3 ) 0.025 - (Bi 0.5 Sb 1.5 Te 3 ) 0.975 Pseudo binary alloy, the alloy at 170 o When the temperature is about C, the best thermoelectric performance can be obtained (ZT=1.2); 2 Te 3 ) 0.9 -(Bi 1.9 Cu 0.1 Se 3 ) 0.1 Pseudo binary alloy, the alloy at 144 o When it is around C, the best thermoelectric performance (ZT=0.98) is obtained. Cut according to the size of the thermoelectric pair, the size of p-type and n-type single arm material is 2.2′1.4′1.4 mm 3 , where 2.2 mm is the height.
[0023] Step 2: A total of 127 pairs of thermoelectric semiconductor temperature sensor chips are designed. The two ends of the single arm of each ...
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