Electrode structure of PECVD (Plasma Enhanced Chemical Vapor Deposition) coating film device

Abstract

The invention provides an electrode structure of a PECVD (Plasma Enhanced Chemical Vapor Deposition) coating film device. The electrode structure of the PECVD coating film structure comprises a first electrode pair and a second electrode pair, wherein the first electrode pair comprises a first electrode roll and a second electrode roll which are oppositely arranged, a first internal magnetic circuit is arranged in the first electrode roll, a second internal magnetic circuit is arranged in the second electrode roll; and a center connecting line of two electrodes of the second electrode pair and a center connecting line of the first electrode roll and the second electrode roll are perpendicular to each other and are symmetrically arranged. According to the electrode structure of the PECVD coating film device, provided by the invention, a discharge voltage can be reduced, the error discharge can be greatly avoided, the energy consumption is reduced, and the film surface quality is improved.

Description

technical field [0001] The invention relates to the technical field of gas discharge, in particular to an electrode structure of a PECVD coating device. Background technique [0002] For the schematic diagram of the electrode structure of the traditional PECVD coating device, please refer to the attached figure 1 , the electrode rollers 11a, 11b are placed facing each other, wherein the inner magnetic circuits 12a, 12b are respectively arranged, the outer magnetic circuit 13 is arranged outside the electrode rollers 11a, 11b and the inner magnetic circuits 12a, 12b form a magnetic circuit, and the air intake pipe is arranged on the two electrode rollers the upper part between. Discharge occurs between the electrode rollers 11a, 11b and forms a plasma discharge area 15. [0003] The electrode structure of the current PECVD coating device is usually to place a pair of electrode rollers facing each other to form a plasma discharge area between the two electrode rollers. Such ...

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Problems solved by technology

[0003] The electrode structure of the current PECVD coating device is usually to place a pair of electrode rollers facing each other to form a plasma discharge area between the two electrode rollers. Such a structure has a high discharge voltage and consumes a large amount of power, and the discharge voltage is high. Various misdischarges are caused, and the electrode surface is prone to sparking, which is also extremely detrimental to the performance of the membrane surface.

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