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A method of manufacturing a reticle

A manufacturing method and a reticle technology, which are applied in the photoengraving process, optics, instruments and other directions of the pattern surface, can solve the problems of complex process and other problems, and achieve the effects of simple process, improved alignment accuracy, and improved production efficiency.

Active Publication Date: 2017-10-13
BAZHOU YUNGU ELECTRONICS TECH CO LTD
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Problems solved by technology

The above-mentioned patent documents require multiple processes when making recessed alignment marks on the substrate, and the process is complicated

Method used

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  • A method of manufacturing a reticle
  • A method of manufacturing a reticle
  • A method of manufacturing a reticle

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Embodiment Construction

[0036] In order to make the object, technical solution and advantages of the present invention clearer, the implementation manner of the present invention will be further described in detail below in conjunction with the accompanying drawings.

[0037] Such as figure 1 As shown, the present invention provides a kind of manufacturing method of reticle, wherein manufacturing method comprises the following steps:

[0038] Step 1, uniformly coat the photoresist on the optical element, and bake it into a film; the thickness of the photoresist coating here is 1 micron-10 microns, and the thickness of the photoresist film after baking is 1 micron~ 10 microns;

[0039] Step 2, using a laser plotter to make a hollow alignment mark on the photoresist on the optical element;

[0040] Step 3: aligning and laminating the mother board with the solid alignment mark pattern and the hollow alignment mark on the optical element through the microscope alignment system, and exposing the bonded...

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Abstract

The invention discloses a method for manufacturing a reticle, which comprises the following steps: uniformly coating photoresist on an optical element, and baking to form a film; using a plotter to make hollow alignment on the photoresist on the optical element mark; through the microscope alignment system, the motherboard with the solid alignment mark pattern and the hollow alignment mark on the optical element are aligned and bonded, and the bonded optical element is exposed; the exposed optical element The components are placed in a developer solution to develop the photoresist; the developed optical components are cleaned to make a reticle. In the present invention, by coating black glue or dark-colored photoresist on the optical element, and using a laser plotter to accurately make hollow alignment marks on the photoresist, the precise positioning and bonding of the motherboard and the optical element can be realized, and the improvement can be improved. The qualification rate of the reticle is improved, and the manufacturing process is simple.

Description

technical field [0001] The invention relates to the field of reticle technology, in particular to a method for manufacturing a reticle. Background technique [0002] The reticle is generally installed on the focal plane of the right eyepiece of the telescope, such as Figure 4 As shown, it is a thin glass with a very thin surface engraved with dense bit lines. Since this thin glass also participates in imaging theoretically, the focal length of the objective lens is extended, and the length of the right eyepiece will be more or less less impact. The reticle has extremely high requirements on cleanliness, and any tiny dust will produce large black spots during observation; at the same time, the installation position accuracy of the reticle is extremely high (the deviation between the center of the optical glass and the center of the pattern is ±0.03mm), Therefore, try not to disassemble it, and if it is disassembled, it must be restored as it was. [0003] Chinese patent do...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B27/32G03F9/00G02B23/00
Inventor 吴空物王静
Owner BAZHOU YUNGU ELECTRONICS TECH CO LTD
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